Mitsubishi Electric Research Laboratories, Inc.

Mitsubishi Electric Corporation

Joshua Rapp

Philip Orlik

Petros T Boufounos

Kieran Parsons

Hassan Mansour

Toshiaki Koike Akino

Yanting Ma

Toshiaki Akino

Alfred Ulvog

An optical coherence tomography (OCT) system comprises an interferometer configured to split incident light into a reference beam and a test beam, and to interfere the test beam reflected from the specimen with the reference beam reflected from a reference mirror to produce an interference pattern. The OCT system also comprises a spectrometer configured to analyze spectral components of the interference pattern at non-uniformly sampled wavenumbers. A computer-readable memory of the OCT system is configured to store a measurement model with elements connecting different depth values with different non-uniformly sampled wavenumbers and weighted with weights derived from a power spectral density (PSD) of the incident light for corresponding wavenumbers. The OCT system further comprises a processor configured to determine the profilometry measurements of the specimen as a maximum likelihood estimate of the specimen surface depth by back-projection of the measured intensities with the measurement model.

Systems and methods for surface profile estimation via optical coherence tomography

Growing community of inventors

Somerville, MA, United States of America

Joshua Rapp