Cymer, Inc.

Joshua J Miller

William N Partlo

Igor Vladimirovich Fomenkov

Alexander Igorevich Ershov

Richard L Sandstrom

Georgiy Olegovich Vaschenko

David C Brandt

A system and method generating an extreme ultraviolet light in an extreme ultraviolet light chamber including a collector mirror, a droplet generation system having a droplet outlet aligned to output a plurality of droplets along a target material path and a first catch including a first open end substantially aligned to the target material path and at least one internal surface oriented toward a second end of the first catch, the second end being opposite from the first open end.

Growing community of inventors

San Diego, CA, United States of America

Joshua J Miller