University of California

Purdue Research Foundation

Joshua Azariah Small

Dimitrios Peroulis

Xiaoguang Liu

Muhammad Shoaib Arif

Mihal Sinani

Adam Fruehling

Akash Anand

Wasim Irshad

A tunable cavity resonator includes a housing, a post, and a controllably variable capacitive coupling. The housing defines an interior and has at least one side wall, a first end, and a second end. The post is located within the interior and extends from the first end to the second end. The post and the housing define a resonating cavity. The controllably variable capacitive coupling is disposed in the housing.

Tunable cavity resonator having a post and variable capacitive coupling

A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.

Tunable cavity resonator including a plurality of MEMS beams

Growing community of inventors

Lexington Park, MD, United States of America

Joshua Azariah Small