Average Co-Inventor Count = 7.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Kla Tencor Corporation (1 from 1,787 patents)
1 patent:
1. 8724115 - Linear stage and metrology architecture for reflective electron beam lithography