Rca Inc.

Joseph Zelez

John L Vossen

The optical transmission of an amorphous, carbonaceous film having diamond-like properties is enhanced by the ion implantation thereof with carbon ions. The film preferably is between about 30 and 110 nanometers in thickness and is implanted with a dosage of between about 10.sup.12 and 10.sup.14 carbon ions per square centimeter.

Diamond-like film

An amorphous, carbonaceous, diamond-like film and a process for producing the same is disclosed. The film has an extremely low hydrogen content and an extremely low stress, is resistant to both acids and alkalis, and adheres tenaciously to many types of substrates including glasses, plastics, metals, and semiconductors. The process for producing this film is a hybrid process using radio frequency plasma decomposition of an alkane and a pair of spaced carbon electrodes.

Diamond-like film and process for producing same

Transparent conductive films of indium oxide and zirconium oxide, methodology for annealing them and an etchant therefor are disclosed.

Transparent conductive film

A method of forming areas of high and low resistivity in a transparent film of indium oxide and zirconium oxide is disclosed. The film is selectively ion implanted with protons and then annealed to lower the resistivity in the non-implanted portion.

Transparent conductive film having areas of high and low resistivity

An improvement in the formation of multilayer metallization systems wherein vias are formed in a dielectric insulating layer of polyimide which overlies a layer of metal such as aluminum. In accordance with the invention, the residual film remaining after oxygen plasma etching of the polyimide is efficiently removed by a second plasma etching utilizing a mixture of argon and hydrogen.

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Tannersville, PA, United States of America

Joseph Zelez