Taiwan Semiconductor Manufacturing Comp. Ltd.

Joseph W L Fang

Mu-Tsang Lin

Jian-Hong Chen

Tien-Wen Wang

Yu-Yi Wu

Chon-Hwa Chu

Ie-Fun Lai

Wen-Sheng Chien

Chin-Chih Chen

Yao-Wen Wu

A system and method for automatic SPC chart generation including a storage device and a data acquisition module. The storage device stores a chamber management tree, a recipe window management tree, a parameter configuration table and multiple chart profile records. The data acquisition module, which resides in a memory, acquires multiple process events and parameter values corresponding to the process events and a process parameter, selects a relevant statistical algorithm, calculates a statistical value by applying the statistical algorithm to the parameter values, creates a new chart profile record and a parameter statistics record therein if the chart profile record is absent, and stores the statistical values and measured time in the parameter statistics record.

Automatic statistical process control (SPC) chart generation apparatus and method thereof

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Hsinchu, Taiwan

Joseph W L Fang