Globalfoundries Inc.

Globalfoundries U.S. Inc.

Joseph Versaggi

Bipul C Paul

Anuj Gupta

Venkatesh P Gopinath

Daniel J Jaeger

Gregory Allen Northrop

Jae Gon Lee

Abu Naser M Zainuddin

Wei Ma

Harsh N Patel

Thomas Kauerauf

Hajime Terazawa

The present disclosure relates to semiconductor structures and, more particularly, to a capacitor integrated with a memory element of a memory cell and methods of manufacture. The structure includes: at least one memory cell comprising a memory element with a top conductor material; and a capacitor connected to the memory element by the top conductor material.

Capacitor integrated with memory element of memory cell

The present disclosure generally relates to semiconductor structures and, more particularly, to twisted wordline structures and methods of manufacture. The memory array structure includes: a plurality of bitcells comprising memory elements and access transistors; a plurality of bitlines and wordlines which interconnect the bitcells; a plurality of dummy bitcells which intersect with the bitlines and wordlines; and a plurality of twisted wordline strap cells which twist wordlines in the dummy bitcells and connect a higher metal layer in the bitcells to a gate structure of the access transistor.

Twisted wordline structures

One illustrative method disclosed herein includes forming 1st and 2nd sacrificial gate structures for, respectively, 1st and 2nd devices, removing 1st and 2nd sacrificial gate electrodes from the 1st and 2nd sacrificial gate structures so as to at least partially define, respectively, 1st and 2nd replacement gate (RMG) cavities, and removing the 2nd sacrificial gate insulation layer from the 2nd RMG cavity while leaving the 1st sacrificial gate insulation layer in position in the 1st RMG cavity. The method also includes forming a conformal gate insulation layer in both the 1st and 2nd RMG cavities, removing the conformal gate insulation layer and the 1st sacrificial gate insulation layer from the 1st RMG cavity while leaving the conformal gate insulation layer in the 2nd RMG cavity, and performing an oxidation process to form an interfacial gate insulation layer only in the 1st RMG cavity.

Methods of forming gate structures for transistor devices on an IC product

Structures for a non-volatile memory and methods for fabricating such structures. An active array region of a memory structure includes a plurality of active bitcells and a wordline. Dummy bitcells of the memory structure are arranged in a column within the active array region. An interconnect structure includes a metallization level having a wordline strap that extends across the active array region and that is arranged over the active array region.

Wordline strapping for non-volatile memory elements

Structures for a non-volatile memory and methods for forming and using such structures. A bitcell of the non-volatile memory includes a nonvolatile memory element and a field-effect transistor having a drain region coupled with the nonvolatile memory element, a source region, and a gate electrode. A word line is coupled with the gate electrode of the field-effect transistor, a bit line is coupled with the nonvolatile memory element, and a source line is coupled with the source region of the field-effect transistor. A power supply is configured to supply a negative bias voltage to the bit line in order to provide a first state for writing data to the nonvolatile memory element or to supply the negative bias voltage to the source line in order to provide a second state for writing data to the nonvolatile memory element.

Dynamic bipolar write-assist for non-volatile memory elements

Disclosed are an in-kerf test structure and testing method for testing an on-chip device. The structure includes at least one test component with at least one test device and adjoining dummy devices connected to the test device. Each adjoining dummy device has proximal node(s) directly connected to a test device and distal node(s) that are not directly connected to a test device. The nodes of each test device and the distal nodes of each adjoining dummy device are connected to input/output pads. During testing the input/output pads are used to bias the nodes of a selected test device as well as the distal node(s) of any adjoining dummy device. By biasing the distal node(s) of an adjoining dummy device, random accumulation of potential thereon is avoided and current contributions from the adjoining dummy device(s) to a current measurement taken from the selected test device can be accurately determined.

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Galway, NY, United States of America

Joseph Versaggi