Air Products and Chemicals, Inc.

Versum Materials Us, LLC

Joseph T Sluzevich

Howard P Withers, Jr

James Joseph Hart

Rajiv Krishan Agarwal

Sai-Hong Andrew Lo

Jr Howard Paul Withers

The method described herein provides a method for preparing trisilylamine. In one aspect, the method comprises: providing a reaction mixture of trisilylamine and monochlorosilane into a reactor wherein the reaction mixture is at a temperature and pressure sufficient to provide trisilylamine in a liquid phase wherein the reaction mixture is substantially free of an added solvent; contacting the reaction mixture with ammonia to provide a crude mixture comprising trisilylamine and an ammonium chloride solid wherein monochlorosilane is in stoichiometric excess in relation to ammonia; purifiying the crude mixture to provide trisilylamine wherein the trisilyamine is produced at purity level of 90% or greater; and optionally removing the ammonium chloride solid from the reactor.

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Frackville, PA, United States of America

Joseph T Sluzevich