U.S. Philips Corporation

Koninklijke Philips Corporation N.V.

Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Philips Corporate Intellectual Property Gmbh

Koninklijke Philips Electronics N.v.

Philips Intellectual Property & Standards Gmbh

Joseph Rr Pankert

Willi Neff

Klaus Bergmann

Oliver Rosier

Uwe Dibbern

Vassilios Zaspalis

Jürgen Klein

Rudiger Mauczok

Stefan Seiwart

Johannes R Roulaux

Michael Löken

Detlev Hennins

Stefan Seiwert

A method for generating extreme ultraviolet radiation and soft x-ray radiation with a gas discharge operated on the left branch of the Paschen curve, in particular, for EUV lithography, wherein a discharge chamber () of a predetermined gas pressure and two electrodes () are used, wherein the electrodes have an opening (), respectively, positioned on the same symmetry axis () and, in the course of a voltage increase () upon reaching a predetermined ignition voltage (U), generate a plasma () located in the area between their openings (), which plasma is a source of the radiation (') to be generated,wherein an ignition of the plasma () is realized by affecting the gas pressure and/or by triggering,and wherein, with the ignition of the plasma (), an energy storage device supplies by means of the electrodes () stored energy into the plasma (), characterized in that the ignition of the plasma () is realized by using a predetermined ignition delay ().

Method and device for producing extreme ultraviolet radiation and soft x-ray radiation

In a method for generating extreme ultraviolet radiation or soft x-ray radiation by means of gas discharge, in particular, for EUV lithography, a discharge vessel is provided with two electrodes that are connected to high voltage. Between the electrodes, in an area of two electrode recesses that are coaxial to one another, a gas fill with predetermined gas pressure in accordance with a discharge operation realized on the left branch of the Paschen curve is provided. In this area, a plasma emitting the radiation is generated when supplying energy. The plasma is displaced or deformed by a pressure change of the gas fill in the area of the electrode recesses.

Method and device for the generation of far ultraviolet or soft x-ray radiation

A magnetodielectric ceramic composite material comprising a first disperse phase which contains one or more magnetic ferrites, and a second, essentially continuous phase which contains electrically insulating oxides, characterized in that the electrically insulating oxides are lead(II) oxide, bismuth(III) oxide and, optionally, boron(III) oxide, is distinguished by an improved construction of the surface boundary layer. Said composite material can very suitably be used for the manufacture of frequency-selective components and wideband transmitters having a high initial permeability and a high critical frequency f.sub.0 in the range from 1 . . . 200 MHz, and for the manufacture of monolithic, multifunctional components. A description is given of a simple method of manufacturing said composite material.

Magnetodielectric ceramic composite material, method of manufacturing

The device comprises a recording head including: a chamber plate having oppositely situated first and second faces, pressure chambers being formed as through holes extending between the first and second faces of the chamber plate, the pressure chambers being arranged in substantially parallel first and second rows; a nozzle plate attached to one of the faces of the chamber plate, said nozzle plate comprising a number of nozzle openings corresponding to the number of pressure chambers, each nozzle opening communicating with one of the pressure chambers; a piezoelectric actuator element associated with each pressure chamber, said actuator element having an active direction and comprising at least one layer of piezoelectric material and at least two electrode layers which are arranged such that the dimension of the actuator element in the active direction is varied upon application of an electric voltage between the electrode layers, the actuator element being arranged in cooperative relationship with the associated pressure chamber so that the pressure chamber changes its volume when the dimension of the actuator element in the active direction is varied. The recording head further comprises ink supply means provided at the faces of the chamber plate, said ink supply means comprising four ducts extending substantially parallel to the rows of pressure chambers, each pressure chamber communicating with the ink supply means via an ink supply channel. The first and second ducts are provided at the first face of the chamber plate and the third and fourth ducts are provided at the second face of the chamber plate. The second, fourth, sixth, etcetera pressure chambers of the first row communicate with the first duct, the second, fourth, sixth, etcetera pressure chambers of the second row communicate with the second duct, the first, third, fifth, etcetera pressure chambers of the first row communicate with the third duct, and the first, third, fifth, etcetera pressure chambers of the second row communicate with the fourth duct. As a result, full colour printing is possible with only one recording head.

Ink jet recording device

An ink jet recording device includes an ink jet recording head comprising at least one pressure chamber communicating with an ink reservoir via an ink supply channel and a nozzle plate comprising at least one nozzle opening for emitting droplets of ink, the nozzle plate forms a wall of the pressure chamber. The recording head further comprises a piezoelectric actuator element having an active direction and comprising at least one layer of piezoelectric material and at least two electrode layers which are arranged such that the dimension of the actuator element in the active direction is varied upon application of an electric voltage between terminals that are electrically connected to the electrode layers. The actuator element is arranged in cooperative relationship with the pressure chamber so that the pressure chamber changes its volume when the dimension of the actuator element in the active direction is varied. The piezoelectric actuator element is formed as an actuator plate, its active direction coinciding with the direction of the thickness of the actuator plate, and a recess is provided in the actuator plate to form the pressure chamber.

Ink jet recording device with pressure chamber having an active

A torsional actuator consisting of multilayers of monolithic piezo-electric ceramic material, with planar electrodes between the successive layers and external contacts for supplying control voltages to the electrodes which cause the actuator to twist about its longitudinal axis by a torsion angle dependent on the control voltages. Viewed in cross-section, and with respect to a reference potential supplied to alternate ones of the electrodes, the remaining electrodes are in four respective quadrants and are supplied with control voltages of polarities dependent on the quadrants in which they are located.

Torsional actuator and method of manufacturing same

A radiation detector having a radiation detection element of a pyroelectric ceramic material on the basis of lead titanate, the composition of which corresponds to the formula Pb.sub.1-(x+0.5(x-y)) RE.sub.x (Ti.sub.1-y Mn.sub.y)O.sub.3, where RE is at least one rare earth metal and 0.04.ltoreq.x.ltoreq.0.20 and 0.01.ltoreq.y.ltoreq.0.04. The element is disposed within a windowed housing.

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Aachen, Germany

Joseph Rr Pankert