Accsys Technology, Incorporated

Tosoh Set, Inc.

Joseph Patrick Rymer

James M Potter

John H Bower

Rafael Ricolcol

An improved component for use in a deposition chamber is constructed from ceramic zirconia and a stabilizing compound. The zirconia is preferably in a partially stabilized form and is coated with a metallic layer such as thermally sprayed aluminum. The surface of the zirconia is roughened to improve adhesion between the zirconia and the aluminum. Alternatively, an intermediate layer may be deposed between the zirconia and the metallic layer to improve the bonding between the layers. The coated zirconia component resists flaking when covered with materials that are being deposited in the deposition chamber and, thus, reduces the likelihood that devices being constructed in the deposition chamber will be contaminated by loose particles.

Bond strength of coatings to ceramic components

Apparatus for normalizing and maximizing the performance of a drift tube on the operational axis of a drift tube linac. The apparatus features drift tube positioning through structure which includes orthogonally disposed, facially complementary datum surfaces, interposed which surfaces are dimensionally stable, clamped shim structure. Also offered is independently attachable/detachable (non-dedicated in place) adjustment mechanism employable to effect adjustments in the usual post-coupler structures associated with drift tubes.

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Livermore, CA, United States of America

Joseph Patrick Rymer