Nikon Corporation

Joseph P Rossi

Chetan Mahadeswaraswamy

Johnathan Marquez

A stage assembly () that moves a device () includes a stage () that retains the device (), a base (), a stage mover assembly (), and a supply system (A). The supply system (A) is secured to and positioned on the stage (). The supply system (A) includes a circulation system () that circulates a circulation fluid () through a circulation conduit (D) in the stage () to control the temperature of the stage () and the device (). The circulation system () can include a storage container assembly (A) that defines a supply chamber () that supplies pressurized circulation fluid () to the circulation conduit (D), a return chamber () that receives the circulation fluid () that was circulated through the circulation conduit (D), a movable piston () that separates the supply chamber () from the return chamber (), and a piston urger () that urges the piston () to move to reduce the supply volume of the supply chamber () and urge the circulation fluid () out of the supply chamber ().

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San Jose, CA, United States of America

Joseph P Rossi