International Business Machines Corporation

Joseph P DeGeorge

Michael A Cohn

Ryan Wayne Wuthrich

Christopher N Collins

Scott Matthew Hargash

William Robert Copeland

Kurt Elmer Bastian

Italo A DiNunzio

Rao Venkateswara Vallabhaneni

Robert S Young

Robert J Sullivan

John R Lankard, Jr

Robert L Baan

Matthew F Stanton

Alan Piciacchio

Gregory S Boettcher

Teresa L Pinto

Robert C Greenlese

Raymond H Turcotte

Mark C Easton

Robert Raymond Young, Jr

Joseph Casaregola

Kevin R Geysen

James J Burte

William T Petry

Bryant L Hancock

A system and method for detecting leaks in pressurized or vacuum pipes is disclosed. A pipe clamp comprises a housing that surrounds a pipe fitting. A containment chamber within the pipe clamp prevents leaked gas from escaping into the environment. The pipe clamp is installed in series with an exhaust line to remove the leaked gas from the containment chamber. A sensor may be configured and disposed to detect a change in pressure in the containment chamber to indicate the occurrence of a leak.

Pipe monitoring system and method

Embodiments of the present invention provide a vacuum trap labyrinth with improved trapping characteristics. The vacuum trap labyrinth comprised of an inner part and an outer part that fit together while in use, and come apart for easy cleaning during maintenance. The vacuum trap labyrinth is installed in a catchpot. In one embodiment, an O-ring is used to seal off an area of the catchpot to facilitate a visual inspection.

Vacuum trap labyrinth

An apparatus for implementing an emergency machine off circuit of a fabrication system, includes: at least one safety switch adapted for shunting an operation enable signal from a piece of equipment selected for removal from service, the switch also removing from service supplemental devices for the selected equipment. A semiconductor fabrication system and a method for removing equipment from service are provided.

Emergency machine off feature with safety control interface

An arrangement for aligning a semiconductor process tool to a track system, and a method which facilitates the calibration and alignment between a previously installed overhead transport system in a fabrication facility or plant for semiconductor wafers or integrated circuit components, and a plurality of load ports on a process tool for the semiconductor wafer or integrated circuit components, which is to be subsequently installed in the fabrication facility.

Automated material handling laser alignment tool

A method of and novel composition for transient liquid phase bonding of refractory metal structures is described herein. Preferably, the composition comprises a first component substantially similar to the composition of the refractory metal structure, and a second component having a lower melting temperature than the first component comprising a metallic constituent selected from the group consisting of iron, nickel and cobalt. The second component acts as a melting point depressant to temporarily lower the melting point of the first component so that the join can be accomplished without melting the structure itself. Upon applying the composition to the surfaces of refractory metal structures in need of joining, the assembly is heated to a eutectic point defined as the lowest melting point of the composition. A localized liquid region is formed at the interface of the two structures which solidifies when the second component diffuses into the structures such that the region becomes increasingly refractory thereby solidifying into a substantially refractory joint.

High temperature refractory joining paste

An article handler having a plurality of compartments in a frame with each compartment having a plurality of ribs extending across the compartments. The ribs in adjacent compartments extend perpendicularly to each other to provide resistance against warping of the frame in both directions, thereby maintaining the frame flat. The compartments are covered by filters. Suction is distributed throughout each compartment. When the filters are positioned in proximity to articles, the suction in the compartments is effective to lift the articles.

Article handler

Camber of ceramic substrates is prevented by placing a conformable load tile over substrates during sintering. The conformable load tile has an initial curvature that facilitates escape of substrate binder gases during a burn out cycle. Subsequently, the conformable load tile conforms to the substrates under the higher heat of sintering temperature to maintain flatness of the substrates. To prevent sticking of the conformable load tile to the substrates, the conformable load tile is provided with a nonstick surface.

Weighted sintering process and conformable load tile

A stacking system includes a frame having recesses therein used to partially define openings that permit gas generated during firing of a substrate within the space defined by the frame to escape without adversely affecting the substrate. A relatively thin tile placed on the frame provides the system with an additional level for substrates.

Stacking system for substrates

Growing community of inventors

Wappingers Falls, NY, United States of America

Joseph P DeGeorge