Kla Tencor Corporation

Joseph Maurino

Mark Armstrong McCord

Christopher F Bevis

Alan D Brodie

William M Tong

Paul F Petric

Oscar G Florendo

Sameet K Shriyan

Daniel Bui

Shinichi Kojima

These electron beam separator designs address thermally-induced beam drift in an electron-optical system. A heater coil wrapped around the beam separator unit can maintain constant power. Additional coils also can be wrapped around the beam separator in a bifilar manner, which can maintain constant power in the beam separator coils. Wien power can be determined, and then heater coil current can be determined.

Method of eliminating thermally induced beam drift in an electron beam separator

One embodiment relates to a high-voltage electron gun including an insulator stand-off having a resistive layer. The resistive layer is at least on an interior surface of the insulator stand-off. A cathode holder is coupled to one end of the insulator 115 stand-off, and an anode is coupled to the other end. The resistive layer advantageously increases the surface breakdown field strength for the insulator stand-off and so enables a compact design for the high-voltage electron gun. Other embodiments, aspects and feature are also disclosed.

Compact high-voltage electron gun

One embodiment disclosed relates a method of detecting a patterned electron beam. The patterned electron beam is focused onto a grating with a pattern that has a same pitch as the patterned electron beam. Electrons of the patterned electron beam that pass through the grating un-scattered are detected. Another embodiment relates to focusing the patterned electron beam onto a grating with a pattern that has a second pitch that is different than a first pitch of the patterned electron beam. Electrons of the patterned electron beam that pass through the grating form a Moir&#xe9; pattern that is detected using a position-sensitive detector. Other embodiments, aspects and features are also disclosed.

Apparatus and methods for electron beam detection

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San Mateo, CA, United States of America

Joseph Maurino