E.a. Fischione Instruments, Inc.

Other

Robicon Corporation

Joseph M Matesa, Jr

Paul E Fischione

David W Smith

Michael Ross Scheinfein

Thomas C Swihart, Iii

David Martin

Peter W Hammond

Marc Francis Aiello

Alan C Robins

Rocco R Cerchiara

An ion source is disclosed which utilizes independently powered electrodes that are isolated with a series of insulators. The ion source comprises an anode electrode with a hollow interior, where the anode is disposed between a cathode and an anti-cathode. A magnet or electro-magnet imposes a magnetic field in an axial direction through the bore of the anode. Gas is introduced into the anode area at a controllable pressure. The ion source includes a first voltage differential between the anode and cathode for the production of plasma and a second voltage differential between the anode and the anti-cathode for extraction of ions from the plasma, forming an ion beam, which is preferably of a narrow diameter at low beam energy. In particular, the voltage differential between the anti-cathode and anode is adjusted to control the initial beam divergence of extracted ions. An optional focus electrode with an independent power supply further focuses the ion beam. A final electrode defines the output boundary of the ion source to provide un-perturbed drift of the ions into the vacuum chamber.

Ion source with independent power supplies

An audible alarm detector is disclosed, consisting of a microphone, band-pass filter, counter and controller. The microphone converts the acoustic signal to an electrical signal for further processing. The band-pass filter removes frequencies different from the nominal frequency of a pulsed tone alarm. The counter detects the fundamental frequency of the filtered signal in sequential time intervals. The controller compares the counter's output for each time interval with the nominal count for the expected alarm frequency. The controller also compares the results from sequential time intervals against the nominal time-sequence of the anticipated, pulsed-tone alarm. A sufficiently close match results in a positive detection condition. An audible alarm detection method is also disclosed, consisting of low-pass filtering, followed by baseline-comparison, followed by counting, followed by discrimination based on counts, followed by comparison of discriminator output sequence versus the nominal sequence.

Alarm detection device and method

An apparatus for preparing specimens for microscopy including equipment for providing two or more of each of the following specimen processing activities under continuous vacuum conditions: plasma cleaning the specimen, ion beam or reactive ion beam etching the specimen, plasma etching the specimen and coating the specimen with a conductive material. Also, an apparatus and method for detecting a position of a surface of the specimen in a processing chamber, wherein the detected position is used to automatically move the specimen to appropriate locations for subsequent processing.

Method and apparatus for preparing specimens for microscopy

A milling device is disclosed for the preparation of microscopy specimens or other surface science applications through the use of ion bombardment. The device provides the ability to utilize both gross and fine modification of the specimen surface through the use of high and low energy ion sources. Precise control of the location of the specimen within the impingement beams created by the ion sources provides the ability to tilt and rotate the specimen with respect thereto. Locational control also permits the translocation of the specimen between the various sources under programmatic control and under consistent vacuum conditions. A load lock mechanism is also provided to permit the introduction of specimens into the device without loss of vacuum and with the ability to return the specimen to ambient temperature during such load and unload operation. The specimen may be observed and imaged during all active phases of operation.

Device and method for milling of material using ions

An electrical power converter for an incoming AC transformer connected to a multiphase power source and having multiple secondary windings. Each secondary winding is connected to multiple switching cells, each of which functions like a matrix converter. The secondary windings can be either single or multi-phase and more than one transformer can be provided such that the multiple secondary windings can be distributed among individual transformers. The output of at least two of the switching cells are connected in series. The switching cells can be either bi-directional or unidirectional and can also have a three-phase input. A combination of IGBTs and diodes can form the switching cells.

Growing community of inventors

Murrysville, PA, United States of America

Joseph M Matesa, Jr