International Business Machines Corporation

Globalfoundries Inc.

Other

Marvell Asia Pte., Ltd.

Joseph M Lukaitis

Robert Russell Robison

Ping-Chuan Wang

Timothy Dooling Sullivan

Ephrem G Gebreselasie

Jed Hickory Rankin

Alain F Loiseau

Andreas Daniel Stricker

Kimball M Watson

Dustin Kenneth Slisher

Richard A Poro, Iii

Ronald G Filippi

Kaushik Chanda

Deborah M Massey

Stewart E Rauch, Iii

Ahmed Y Ginawi

Brent A Anderson

William R Tonti

Anthony I Chou

Leathen Shi

Johann Alsmeier

Rajesh Rengarajan

David L Harmon

Sungjae Lee

Jeffrey H Sloan

Fernando Jose Guarin

Giuseppe La Rosa

Giuseppe LaRosa

Anastasios A Katsetos

Stephen P Boffoli

B B (Bob) Lawhorn

Richard Antoine Poro

Paul R Herb

Samuel M Goldfarb

The present disclosure relates to an electrostatic discharge (ESD) clamp and, more particularly, to an ESD clamp with reduced off-state power consumption. The structure includes: one or more inverters connected to a timing circuit; a first transistor receiving an output signal from a last of the one or more inverters and an output signal from the timing circuit; a second transistor with its gate connected to the first transistor, in series; and a voltage node providing a separate voltage to a gate of the second transistor.

Electrostatic discharge clamp with reduced off-state power consumption

The present disclosure relates to semiconductor structures and, more particularly, to electrostatic discharge (ESD) protection structures for eFuses. The structure includes an electrostatic discharge (ESD) protection structure operatively coupled to an eFuse, which is structured to prevent unintentional programming of the eFuse due to an ESD event originating at a source.

Electrostatic discharge protection structures for eFuses

A method for matching a pair of matched bipolar transistors in an integrated circuit is disclosed. Within a device, it is determined which transistor is a correctable transistor of the pair of bipolar transistors. The correctable transistor is the transistor of the pair of bipolar transistors having a chosen characteristic which when electrically stressed will converge with a chosen characteristic of the other transistor of the pair of bipolar transistors. The pair of bipolar transistors are matched by electrically stressing the correctable transistor of the bipolar transistors.

Matching of bipolar transistor pair through electrical stress

Methods and structures for capacitively isolating a heat shield from a handle wafer of a silicon-on-insulator substrate. A contact plug is located in a trench extending through a trench isolation region in a device layer of the silicon-on-insulator substrate and at least partially through a buried insulator layer of the silicon-on-insulator substrate. The heat shield is located in an interconnect structure, which also includes a wire coupling the heat shield with the contact plug. An isolation structure is positioned between the contact plug and a portion of the handle wafer. The isolation structure provides the capacitive isolation.

High performance heat shields with reduced capacitance

Circuits for programming an electrical fuse, methods for programming an electrical fuse, and methods for designing a silicon-controlled rectifier for use in programming an electrical fuse. A programming current for the electrical fuse is directed through the electrical fuse and the silicon-controlled rectifier. Upon reaching a programmed resistance value for the electrical fuse, the silicon-controlled rectifier switches from a low-impedance state to a high-impedance state that interrupts the programming current.

Programming an electrical fuse with a silicon-controlled rectifier

A structure and method of fabricating the structure includes a semiconductor substrate having a top surface defining a horizontal direction and a plurality of interconnect levels stacked from a lowermost level proximate the top surface of the semiconductor substrate to an uppermost level furthest from the top surface. Each of the interconnect levels include vertical metal conductors physically connected to one another in a vertical direction perpendicular to the horizontal direction. The vertical conductors in the lowermost level being physically connected to the top surface of the substrate, and the vertical conductors forming a heat sink connected to the semiconductor substrate. A resistor is included in a layer immediately above the uppermost level. The vertical conductors being aligned under a downward vertical resistor footprint of the resistor, and each interconnect level further include horizontal metal conductors positioned in the horizontal direction and being connected to the vertical conductors.

Method of fabricating thermally controlled refractory metal resistor

A method of forming a semiconductor structure includes forming a resistor on an insulator layer over a substrate and forming a trench in the resistor and into the substrate. The method also includes forming a liner on sidewalls of the trench and forming a core comprising a high thermal conductivity material in the trench and on the liner.

Compact thermally controlled thin film resistors utilizing substrate contacts and methods of manufacture

Thermally controlled refractory metal resistor

A method of forming a semiconductor structure includes forming a resistor on an insulator layer over a substrate, and forming at least one dielectric layer over the resistor. The method also includes forming a substrate contact through the at least one dielectric layer, through the resistor, through the insulator layer, and into the substrate. The substrate contact comprises a high thermal conductivity material.

An apparatus and a method of manufacturing an e-fuse includes a substrate, a patterned gate insulator on the substrate, and a patterned gate conductor on the patterned gate insulator. The patterned gate conductor has sidewalls and a top. A silicide contacts the sidewalls of the patterned gate conductor, the top of the patterned gate conductor, and a region of the substrate adjacent the patterned gate insulator and the patterned gate conductor.

Vertical silicide e-fuse

A method of forming a semiconductor structure includes: forming a resistor over a substrate; forming at least one first contact in contact with the resistor; and forming at least one second contact in contact with the resistor. The resistor is structured and arranged such that current flows from the at least one first contact to the at least one second contact through a central portion of the resistor. The resistor includes at least one extension extending laterally outward from the central portion in a direction parallel to the current flow. The method includes sizing the at least one extension based on a thermal diffusion length of the resistor.

Thin film resistors and methods of manufacture

An electrically programmable fuse includes an anode, a cathode, and a fuse link conductively connecting the cathode with the anode, which is programmable by applying a programming current. The anode and the fuse link each include a polysilicon layer and a silicide layer formed on the polysilicon layer, and the cathode includes the polysilicon layer and a partial silicide layer formed on a predetermined portion of the polysilicon layer of the cathode located adjacent to a cathode junction where the cathode and the fuse link meet.

Electrically programmable fuse and fabrication method

Disclosed are embodiments of a semiconductor structure that incorporates multiple nitride layers stacked between the center region of a device and a blanket oxide layer. These nitride layers are more thermally conductive than the blanket oxide layer and, thus provide improved heat dissipation away from the device. Also disclosed are embodiments of a method of forming such a semiconductor structure in conjunction with the formation of any of the following nitride layers during standard processing of other devices: a nitride hardmask layer (OP layer), a 'sacrificial' nitride layer (SMT layer), a tensile nitride layer (WN layer) and/or a compressive nitride layer (WP layer). Optionally, the embodiments also incorporate incomplete contacts that extend through the blanket oxide layer into one or more of the nitride layers without contacting the device in order to further improve heat dissipation.

Semiconductor structure incorporating multiple nitride layers to improve thermal dissipation away from a device and a method of forming the structure

Growing community of inventors

Pleasant Valley, NY, United States of America

Joseph M Lukaitis