Dow Global Technolgoies LLC

Rohm and Haas Company

Dow Silicones Corporation

Joseph Jacobs

Antony Keith Van Dyk

Ralph Craig Even

Kaoru Aou

Rajat Duggal

Thomas H Kalantar

Paul A Cookson

Yinzhong Guo

Gary William Dombrowski

Yasmin N Srivastava

James M Lipovsky

Gregoire Cardoen

John Klier

Qinghao Meng

Christopher Thiede

Douglas J Hasso

Ludwik S Cygan

Morgan A Springs

Yibei Gu

Carlos A Escobar Marin

Paul Cookson

Methods and apparatus for etching a high aspect ratio feature in a stack on a substrate are provided. The feature may be formed in the process of forming a 3D NAND device. Typically, the stack includes alternating layers of material such as silicon oxide and silicon nitride or silicon oxide and polysilicon. WFis provided in the etch chemistry, which substantially reduces or eliminates problematic sidewall notching. Advantageously, this improvement in sidewall notching does not introduce other tradeoffs such as increased bowing, decreased selectivity, increased capping, or decreased etch rate.

Waterborne dispersion composition

A reaction system for forming a viscoelastic polyurethane foam includes an isocyanate component that has at least one isocyanate and an isocyanate-reactive component that is a mixture formed by adding at least a polyol component, an additive component, and a preformed aqueous polymer dispersion. The mixture includes, based on the total weight of the mixture, from 50.0 wt % to 99.8 wt % of a polyol component including at least one polyether polyol, from 0.1 wt % to 50.0 wt % of an additive component including at least one catalyst, and from 0.1 wt % to 6.0 wt % of a preformed aqueous polymer dispersion. The preformed aqueous polymer dispersion has a solids content from 10 wt % to 80 wt %, based on the total weight of the preformed aqueous polymer dispersion, and is one of an aqueous acid polymer dispersion or an aqueous acid modified polyolefin polymer dispersion in which the polyolefin is derived from at least one Cto Calpha-olefin.

Viscoelastic polyurethane foam with aqueous polymer dispersion

A reaction system for forming a polyurethane foam includes an isocyanate component that has at least one isocyanate and an isocyanate-reactive component that is a mixture formed by adding at least a polyol component, an additive component, and a preformed aqueous polymer dispersion. The mixture includes, based on the total weight of the mixture, from 50.0 wt % to 99.8 wt % of a polyol component including at least one polyether polyol, from 0.1 wt % to 50.0 wt % of an additive component including at least one catalyst, and from 0.1 wt % to 6.0 wt % of a preformed aqueous polymer dispersion. The preformed aqueous polymer dispersion has a solids content from 10 wt % to 80 wt %, based on the total weight of the preformed aqueous polymer dispersion, and is one of an aqueous acid polymer dispersion or an aqueous acid modified polyolefin polymer dispersion in which the polyolefin is derived from at least one Cto Calpha-olefin.

Polyurethane foam with aqueous polymer dispersion

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Yardley, PA, United States of America

Joseph Jacobs