Infineon Technologies Ag

Joseph Hufschmitt

Andreas Wiesbauer

Christian Jenkner

Christian Ebner

Ernesto Romani

Stephan Mechnig

Matthias Friedrich Herrmann

Athanasios Kollias

Francesco Polo

Johannes Hohl

An embodiment includes a method of performing a measurement using a micro-electro-mechanical system (MEMS) device that includes a plurality of MEMS sensors having different resonant frequencies. The method includes applying an excitation signal to a first port of the MEMS device such that each of the plurality of the MEMS sensors is stimulated by the excitation signal. The method further includes measuring a signal at a second port of the MEMS device and determining a measured value based on the measuring the signal.

System and method for a MEMS sensor

A measurement method includes generating, by a sensor, a response signal in response to an excitation signal. The method also includes generating a sampling clock signal in accordance with a pseudo-random jitter, and sampling the response signal in accordance with the sampling clock signal to determine a plurality of digital samples. The method also includes combining the plurality of digital samples to form a measurement sample.

A microphone or a microphone sensor system operates with a sensor interface that receives a supply voltage at a supply terminal. The sensor interface detects a command at the supply terminal based on a change in the supply voltage and communicates the command or data related to the command to a component of the sensor system. The supply terminal is a bidirectional terminal that further communicates data related to the sensor system via the supply terminal.

Microphone configuration and calibration via supply interface

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Munich, Germany

Joseph Hufschmitt