International Business Machines Corporation

Joseph H Koestner

Donald E Griffiths

David G Norton

John H Keller

Frank M Tappen

Brian C O'Neill

William W Hicks

George Anthony Caccoma

A batch chip placement system for batch positioning semiconductor chips, or the like, upon a substrate containing an array of chip sites or footprints whose actual position on the substrate deviates from the theoretical or nominal position over successive substrates. The positioning is achieved by first sensing the X and Y offsets of a pair of alignment marks on the substrate from their theoretical or nominal position to determine the .DELTA.X and .DELTA.Y correction factors required to obtain the actual X,Y position of the alignment marks. The actual X,Y position of the alignment marks is used to determine actual X,Y chip position values, .theta. rotation and shrinkage factor corrections required to obtain proper orientation and positioning for batch chip placement.

Batch chip placement system

In an ion implantation apparatus, a beam defining member such as the acceleration plate is constructed such that the member is maintained at a temperature above the condensation point of the vapor emanating from the source of charged particles, thereby preventing the vapor from condensing on the member and providing a self-cleaning effect.

Radiation heated acceleration

Semi-rigid washers are coaxially disposed to form an air-permeable spindle for coaxially supporting flexible record disks. A plurality of such washers and disks is coaxially stacked to construct a flexible disk file. Washers preferably have an annular shoulder with a depth slightly different than the thickness of the record disks for firmly supporting and aligning same in the coaxial stack. Alternatively, disks may be adhesively secured to a radial outward portion of each washer. Additionally, each washer has a plurality of radially extending air passageways for facilitating radial air movement which controls the stack of flexible record disks. A radial inward portion of each washer abuts each adjacent washer for forming a firm axial stack of disks. A rigid stabilizing plate at each axial end completes the assembly.

Spacer supports for flexible disk structures

A signal storage apparatus employs a stack of circular record disks accessible by axially separating segments of selected disks in the stack. One disk in a stack of coaxial rotatable circular compliant record disks is accessed with a minimum energy imparted to such disks by a chord roll disk separator. In a preferred form, the chord roll disk separator induces a primary bending mode to some of the disks being axially separated. In another aspect of the disclosure, a signal transducer is mounted integrally with the disk separator. With such mounting, primary, secondary, or higher order bending modes may be successfully employed. Full chordal and partial chordal axial disk separations are described. Arcuate and radially directed separation techniques may be employed. A unique axial stacking arrangement for compliant record disks is also described.

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Hopewell Junction, NY, United States of America

Joseph H Koestner