Intel Corporation

Joseph F Walczyk

Paul J Diglio

Arun Krishnamoorthy

James G Maveety

Ashish Gupta

Jin Yang

Todd P Albertson

Jin Pan

Christopher Roy Schroeder

Sruti Chigullapalli

Todd Michael Young

Lothar Kress

Charles Clifton Fulton

David Won-jun Song

Robert Levi Bennett

Planar error between a probe card and a semiconductor wafer may be reduced with a low-profile gimbal platform. The low-profile gimbal platform may be coupled between a probe card and a tester head. The low-profiled gimbal platform includes a number of linear actuators and pistons that are used to perform high-precision in situ planarity adjustments to the probe card to achieve co-planarity between the probe card and the semiconductor wafer. The in situ planarity adjustments may reduce the likelihood of malfunctions due to misalignment of the probe card.

Low-profile gimbal platform for high-resolution in situ co-planarity adjustment

Thermal interface material handing is described for thermal control of an electronic component under test. In one example, a thermal control unit is adapted to control the temperature of at least a portion of an electronic component during testing. A pedestal between the thermal control unit and the electronic component conducts heat from the electronic component to the thermal head. A conduit extends through a portion of the pedestal, to permit the flow of a liquid thermal interface material from an external source to a space between the pedestal and the electronic component. The liquid thermal interface material improves heat conduction between the electronic component and the pedestal. An elastomeric seal between the electronic device and the pedestal constrains the thermal interface fluid within the space between the electronic component and the pedestal.

Thermal interface material handling for thermal control of an electronic component under test

A thermal interface unit includes a pedestal, a first contact surface below the pedestal to interface with a first die and a flat spring to enable the first contact surface to adapt to a variable height of a first die of a multi-chip package (MCP).

Thermal interface for multi-chip packages

Growing community of inventors

Tigard, OR, United States of America

Joseph F Walczyk