The Perkin-Elmer Corporation

Hughes Aircraft Company

Ipec Precision Inc.

Joseph F Vollaro

An apparatus (40) for providing consistent, non-jamming registration of a notched semiconductor wafer (46) undergoing multiple sequential process work includes a plate (41) upon which the wafer (46) is laid flat. The notch (45) of the notched semiconductor wafer (46) is registered against a first roller (42) that is fixedly mounted to the plate (41). A second roller (43), also fixedly mounted to the plate (41), registers a first point (47) along the circumference of the wafer (46). A third roller (48) is fixedly mounted to a bracket (50) that is movable approximately along the radius of the wafer (46). A force (52) is applied to this bracket (50) resulting in the third roller (48) applying a force against the wafer (46). This resultant force, coupled with the rotating capability of the rollers (42,43,48), allows the wafer (46) to rotate into a proper registration position.

Apparatus for providing consistent, non-jamming registration of notched

An apparatus (40) for providing consistent, non-jamming registration of a semiconductor wafer (46) undergoing process work includes a plate (42) upon which the wafer (46) is laid flat. A flat (45) of the wafer (46) is registered against two rollers (43') that are fixedly mounted to the plate (42). A third roller (43), also fixedly mounted to the plate (42), registers a first point (47) along the circumference of the wafer (46). A fourth roller (48) is fixedly mounted to a bracket (50) that is movable approximately along the radius of the wafer (46). A force (54) is applied to this bracket (50) resulting in the fourth roller (48) applying a force against the wafer (46). This resultant force, coupled with the rotating capability of the rollers (43, 43', 48), allows the wafer (46) to rotate into a proper registration position. A second embodiment (60) that incorporates essentially these same force and rotation dynamics through the use of flexures (64, 66, 68) is also disclosed.

Apparatus for providing consistent, non-jamming registration of

An object mounted on a carrier constitute a rotationally free system such as a telescope on a space vehicle. A separation vector is directed from the center-of-mass of the carrier to the center-of-mass of the object. The object is rotated through a selected angle thereby defining a rotation vector. Simultaneously the object is translated so as to displace the object center-of-mass through a translation distance in a direction such that mathematically crossing the translation vector into the separation vector results in a further vector having the same direction as the rotation vector. A formula is provided for the translation distance in order that the object may be rotated without counter-rotation of the carrier.

Method and apparatus for reactionless rotation

A variable width transparent photographic film vacuum hold-down device. Two spaced parallel vacuum slits formed on a flat platen are connected by the longitudinal edges of the film, and when covered by a flexible cover sheet form two vacuum channels holding the film flat and unobscured to the extreme edges. Any film width not exceeding the length of the vacuum slits is held without any modification or adjustment to the device. Any length of film can be used.

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Pleasantville, NY, United States of America

Joseph F Vollaro