Varian Semiconductor Equipment Associates, Inc.

Joseph E Pierro

Frank Sinclair

Bon-Woong Koo

Eric D Hermanson

Antonella Cucchetti

Jun Lu

Michael D Johnson

Michael S DeLucia

An ion source having dual indirectly heated cathodes is disclosed. Each of the cathodes may be independently biased relative to its respective filament so as to vary the profile of the beam current that is extracted from the ion source. In certain embodiments, the ion source is used in conjunction with an ion implanter. The ion implanter comprises a beam profiler to measure the current of the ribbon ion beam as a function of beam position. A controller uses this information to independently control the bias voltages of the two indirectly heated cathodes so as to vary the uniformity of the ribbon ion beam. In certain embodiments, the current passing through each filament may also be independently controlled by the controller.

Dual cathode ion source

Growing community of inventors

Danvers, MA, United States of America

Joseph E Pierro