Lucent Technologies Inc.

At&t Bell Laboratories

Joseph E Griffith

Gabriel L Miller

Charles E Bryson, Iii

Rafael Nathan Kleiman

Robert Charles Frye

Jeffrey Bruce Bindell

Yiu H Wong

A probe tip locator for use in determining the x-axis location and y-axis location of a probe tip of a microscope relative to the locator, the locator comprising a plurality of first reference lines parallel in a first direction, each of the first reference lines representing a predetermined x-axis location of the probe tip; a plurality of sets of parallel encoded bit fields, each one of the sets corresponding to one of the first reference lines; and a plurality of second reference lines parallel in a second direction, each one of the second reference lines intersecting at least one of the first reference lines at an acute angle, such that a scan of a portion of the locator is used to determine the x-axis location and y-axis location of the probe tip relative to the probe tip locator by movement of the probe tip relative to the probe tip locator.

Probe tip locator

A scanning probe microscope equipped with a mechanism for exchanging a probe balance beam from the scan head, wherein the probe balance beam is of the type which is magnetically constrained on the scan head. A magnet having a magnetic field strength greater than that of the scan head magnet is utilized to overcome the attractive force exerted on the balance beam by the scan head magnet and transfer the balance beam from the scan head to a plate in a holding station on the sample table of the microscope. Completely automatic operation is achieved without operator handling of the balance beam.

Mechanism for changing a probe balance beam in a scanning probe

A non-tilting positioner for a micropositioning device constructed of piezoelectric plate actuators each arranged with a pair of opposed parallel edges respectively coupled to first and second elements. A first surface of each plate is divided into quadrants, with first electrodes in each of the quadrants. At least one second electrode is provided on the opposed surface. Electric voltages are applied to the first and second electrodes with appropriate polarities so as to generate an electric field through the thickness of the plate which is of a first polarity in a first pair of diagonally opposite quadrants and is of the opposite polarity in the second pair of diagonally opposite quadrants. Movement along a line parallel to the plane of the plate is thereby effected. Movement in a third orthogonal direction can also be attained by selecting an appropriate electrode pattern. A compact design with double the range is attained by providing at least two of the aforedescribed actuators which are arranged with their plates in parallel or coplanar relation to each other, with a rigid intermediate element being coupled to one end of each of the actuator plates. This 'doubling back' of the plates is inherently thermally compensated and eliminates parasitic vertical motion associated with the desired horizontal motion.

Non-tilting plate actuator for use in a micropositioning device

A scanning probe microscope positioner including an elongated rigid member which is controllably tilted in a predictable manner. One end of the rigid member is subjected to differential motion on opposite sides of its longitudinal axis so as to cause its opposite end to partake of lateral displacement which is a magnification of the differential motion. By a careful selection of component materials and sizes, inherent thermal compensation can be attained.

Tilting positioner for a micropositioning device

A force-sensing system suitable, for example, for atomic force microscopy. This system includes a rocking beam, a base, and means for supporting the beam adjacent a surface of the base such that the beam can pivot about at least one axis parallel to the base surface. In contrast to rocking-beam systems of the prior art, the support means comprise at least one pivot element that can be held against the base surface by a magnetic field.

Force-sensing system, including a magnetically mounted rocking element

Dielectrically isolated single crystal silicon of high quality is produced by an extremely convenient process. This process involves the fusing of two silicon bodies where at least one of these bodies has a region of silicon oxide. The bodies are contacted so that the silicon oxide is at an interface between the two bodies. The bodies are then heated to an elevated temperature while applying a nominal electrical potential across the interface. This combination of applied potential and temperature permanently fuses the two bodies without producing any significant damage to the crystal quality of these bodies.

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Berkeley Heights, NJ, United States of America

Joseph E Griffith