Brooks Automation Gmbh

A.t.x. International, Inc.

Joseph D Arruda

Gregor Mittersinker

Glen F R Gilchrist

Robert Southworth

A Jason Mirabito

Kathleen D Keay

Kenneth Rawlings

In one embodiment according to the invention, there is disclosed a method of identifying a source of a vacuum quality problem in a vacuum environment associated with a tool. The method comprises gathering and storing vacuum environment data; identifying an anomaly within the vacuum environment; determining a tool component operating state when the anomaly likely occurred; and determining the source of the vacuum quality problem based on a state of the vacuum environment when the anomaly likely occurred and the tool component operating state when the anomaly likely occurred.

System and method for electronic diagnostics of a process vacuum environment

A palm pad system including an electronic notepad coupled to a conventional personal digital device (&ldquo;PDD&rdquo;) via a data bus is set forth that enables a user to transpose handwritten data into electronic files or pages. The notepad and PDD are mounted onto a common base. The base includes a retaining structure for retaining the notepad on the base and another retaining structure for retaining the PDD on the base. The base further includes a flexible portion that permits the base to be folded into a compact form for protecting the notepad and PDD during transport. A pen containing a transmitter is employed by the palm pad system to transmit a signal to receptive electronics while a user writes data on the notepad with a writing tip contained in the pen. The signal received by the electronics is processed to generate an electronic file representative of the user's handwritten data. The electronic file can be electronically stored and retrieved. The electronic file can also be displayed on a touch sensitive display, which is associated with the PDD, immediately after composition by the user.

Palm pad system

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Swansea, MA, United States of America

Joseph D Arruda