Cabot Corporation

Praxair Technology, Inc.

Rohm and Haas Electronic Materials Cmp Holdings, Inc.

Praxair S.t. Technology, Inc.

Joseph Cianciolo

Bin Chung

Ivan Zlatko Podobnik

Susan W Green

Brian Scott Lombardo

Provided is a seamless polishing pad comprising a seamless polishing layer having a substantially uniform depth of penetration into a porous subpad. In one embodiment, the polishing pad comprises a polishing layer produced by applying to the subpad a hardenable fluid. In another embodiment, the subpad is coated with a barrier before coating with the hardenable fluid. In each embodiment, the depth of penetration of the polishing layer and/or barrier is substantially uniform. Also provided is a method of producing a seamless polishing pad comprising a seamless polishing layer having a substantially uniform depth of penetration into a porous subpad.

Controlled penetration subpad

Elastomer masterbatch is processed in a continuous compounder having multiple parallel elongate rotors axially oriented in an elongate processing chamber. Optionally, additional materials are compounded into the masterbatch, e.g., additives, other elastomeric compositions, etc. Preferably, the masterbatch then is further processed in an open mill. Excellent control of Mooney Viscosity is achieved. In certain preferred embodiments, elastomer composites are produced by novel continuous flow methods and apparatus in which fluid streams of particulate filler and elastomer latex are fed to the mixing zone of a coagulum reactor to form a coagulated mixture in semi-confined flow continuously from the mixing zone through a coagulum zone to a discharge end of the reactor. The particulate filler fluid is fed under high pressure to the mixing zone, such as to form a jet stream to entrain elastomer latex fluid sufficiently energetically to substantially completely coagulate the elastomer with the particulate filler prior to the discharge end without need of adding acid or salt solution or other coagulation step. The coagulated elastomer and particulate filler composite is fed into the aforesaid continuous compounder for processing and control of its moisture level and Mooney Viscosity. Novel elastomer composites are produced. Such novel elastomer composites combine material properties and characteristics, such as choice of filler, elastomer, level of filler loading, moisture level, Mooney Viscosity, balance between molecular weight and amount of bound rubber, and macro-dispersion not previously achieved.

Methods and apparatus for producing and treating novel elastomer composites

Provided are encapsulated belts and encapsulated pads for use in a variety of polishing application, including the chemical-mechanical polishing and planarization of semiconductor wafers and other workpieces. The encapsulated belts and pads are characterized by a robust seal between a polishing layer of the pad or belt and the edges of the subpad layer of the pad or belt. The robust seal is accomplished by casting a polymer directly over the subpad layer. The edges of the subpad layer may include one or more functional features that promote the formation of a watertight and slurry-resistant seal when the subpad layer is covered with a cast polymer. Also provided is a method of producing a robust seal between the polishing layer and the edge region of the subpad by encapsulating a subpad layer with a polymeric material.

Subpad having robust, sealed edges

Method and apparatus for producing and treating novel elastomer composites

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Methuen, MA, United States of America

Joseph Cianciolo