Other

Sciperio, Inc

Ascend Instruments, LLC

Joseph C Robinson

Kenneth H Church

Systems and methods for preparing solid samples for analysis, such as microscopic examination in cross section or planimetric orientation. The sample preparation systems may include a sample support configured to secure a solid sample, an excitation beam source that generates an excitation beam configured to remove material from a surface of the sample, a beam shield configured to at least partially protect the sample from the excitation beam, and a beam shield holder configured to secure the beam shield, where the adjustment of the relative positions of the beam shield and sample holder permits the excitation beam to selectively expose a series of substantially planar surfaces of the sample.

Method and apparatus for in situ preparation of serial planar surfaces for microscopy

Systems for preparing solid samples for microscopic examination in cross section or planametric orientation. The sample preparation systems include a sample support, an excitation beam to remove material from the surface of the sample, and a beam shield that protects the sample from the excitation beam, where sequential vertical adjustment of the beam shield permits the selective exposure of a series of substantially planar sample surfaces.

Method and apparatus for preparing serial planar cross sections

Sample preparation apparatus and method includes a wafer stage platform with an optical microscope and integrated pattern recognition to automatically address specific locations on the wafer sample of interest. A laser attaches to the optical microscope to mill a set pattern around the area of interest. A precision micro-manipulator engages the sample support structure, extracts the structure, and places the structure in a TEM holder or holder tip. The holder or holder tip can then be placed inside a FIB for final thinning, followed by direct transfer into the TEM.

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Portland, OR, United States of America

Joseph C Robinson