Sitime Corporation

Apple Inc.

Other

Joseph C Doll

Paul Merritt Hagelin

Charles I Grosjean

Ginel C Hill

Nicholas Miller

Markus Lutz

Aaron Partridge

Renata Melamud Berger

Teera Songatikamas

Pavan Gupta

Steven Porter Hotelling

Yi Zhang

Adam Monkowski

Michael A Cretella

Behrooz Shahsavari

Siddharth Seth

Douglas J Adams

J Stephen Smith

Jacob E Mattingley

Matthew A Bigarani

Trushal Chokshi

Multiple degenerately-doped silicon layers are implemented within resonant structures to control multiple orders of temperature coefficients of frequency.

MEMS resonator

The present inventions, in one aspect, are directed to micromachined resonator comprising: a first resonant structure extending along a first axis, wherein the first axis is different from a crystal axis of silicon, a second resonant structure extending along a second axis, wherein the second axis is different from the first axis and the crystal axis of silicon and wherein the first resonant structure is coupled to the second resonant structure, and wherein the first and second resonant structures are comprised of silicon (for example, substantially monocrystalline) and include an impurity dopant (for example, phosphorus) having a concentrations which is greater than 10cm, and preferably between 10cmand 10cm.

Resonant elements and oscillators

A moveable micromachined member of a microelectromechanical system (MEMS) device includes an insulating layer disposed between first and second electrically conductive layers. First and second mechanical structures secure the moveable micromachined member to a substrate of the MEMS device and include respective first and second electrical interconnect layers coupled in series, with the first electrically conductive layer of the moveable micromachined member and each other, between first and second electrical terminals to enable conduction of a first joule-heating current from the first electrical terminal to the second electrical terminal through the first electrically conductive layer of the moveable micromachined member.

Microelectromechanical resonator

A microelectromechanical system (MEMS) resonator includes a degenerately-doped single-crystal silicon layer and a piezoelectric material layer disposed on the degenerately-doped single-crystal silicon layer. An electrically-conductive material layer is disposed on the piezoelectric material layer opposite the degenerately-doped single-crystal silicon layer, and patterned to form first and second electrodes.

Piezo-actuated MEMS resonator with reduced nonlinear tcf

Piezo-actuated MEMS resonator

MEMS resonator with beam segments having predefined angular offset to each other and to resonator silicon crystal orientation

Multi-die integrated circuit package

A force transducer for an electronic device can be operated in a drive mode and a sense mode simultaneously. In particular, the force transducer can provide haptic output while simultaneously receiving force input from a user. The force transducer is primarily defined by a monolithic piezoelectric body, a ground electrode, a drive electrode, and a sense electrode. The ground electrode and the drive electrode each include multiple electrically-electrically conductive sheets that extend into the monolithic body; the electrically conductive sheets of the ground electrode and the drive electrode are interdigitally engaged. The sense electrode of the force transducer is typically disposed on an exterior surface of the monolithic body.

Force transducer for electronic devices

Piezo-actuated MEMS resonator with surface electrodes

Growing community of inventors

Mountain View, CA, United States of America

Joseph C Doll