Novellus Systems Incorporated

Other

Joseph Brett Harris

James Forest Lee

Lisa Marie Gytri

Carmen Balderrama

Jeff Gordon

Ming Xi

George D Kamian

Eugene Smargiassi

Stephen Yu-Hong Lau

German A Valcarce

Alejo Itzkovici

Jorge Florin-Christensen

Porogen accumulation in a UV-cure chamber is reduced by removing outgassed porogen through a heated outlet while purge gas is flowed across a window through which a wafer is exposed to UV light. A purge ring having specific major and minor exhaust to inlet area ratios may be partially made of flame polished quartz to improve flow dynamics. The reduction in porogen accumulation allows more wafers to be processed between chamber cleans, thus improving throughput and cost.

Method and apparatuses for reducing porogen accumulation from a UV-cure chamber

Method for reducing porogen accumulation from a UV-cure chamber

The present invention provides methods for changing the composition of a cholesterol-containing foodstuff. The methods comprise the step of culturing a member of the family Tetrahymenidae in a liquid, cholesterol-containing foodstuff under conditions that enable one or more (or all) of the following changes in the composition of the foodstuff: (a) reduction in the level of cholesterol in the treated foodstuff; (b) reduction in the level of saturated fatty acids in the treated foodstuff; (c) increase in the level of unsaturated fatty acids in the treated foodstuff; (d) increase in the level of at least one vitamin D precursor in the treated foodstuff and (e) reduction in the level of at least one protein in the treated foodstuff. The foodstuff can be a dairy product, such as milk or egg yolk.

Methods for treating cholesterol-containing foodstuffs using live ciliates

Growing community of inventors

Tualatin, OR, United States of America

Joseph Brett Harris