Zs-handling Gmbh

Zimmermann & Schilp Handhabungstechnik Gmbh

Technische Universitat Munchen

Corning Precision Materials Co., Ltd.

Pri Automation, Inc.

Zimmerman & Schilp Handhabungstechnik Gmbh

Josef Zimmermann

Adolf Zitzmann

Michael Schilp

Dirk Jacob

J&uuml;rgen H&ouml;ppner

Chan-Kyu Kim

KiNam Kim

Johannes Schlip

A device for treating or acting on workpiece surfaces by means of an actuator, such as a cutting or engraving laser or a nozzle for applying oils, paints, adhesives, dyes, or etchants is disclosed. An ultrasonic levitation force field is generated by means of a sonotrode, which is coupled to the actuator into a working unit, such that the movably suspended working unit is supported on the workpiece surface in a hovering manner. The ultrasonic levitation force field allows a highly precise positioning of the working unit relative to the workpiece surface so as to allow a precise treatment or machining of the workpiece surface.

Device for treating or machining a surface

A device for inspecting a workpiece surface includes a sensor, a sonotrode having a sound-emitting surface and rigidly connected to the sensor to form a sensor unit, and a movable positioning device coupled with the sensor unit to position the sensor unit in a position opposite to the workpiece surface. The positioning device includes a force-applying member to urge the sensor unit in a direction of the workpiece or strip material surface by applying a predefined urging force or using gravity as the urging force. The sound-emitting surface of the sonotrode generates ultrasonic oscillations to produce an ultrasonic levitation force field in the presence of a gaseous medium between the workpiece surface and the sound-emitting surface to thereby generate a counterforce in opposition to the urging force so that the sensor unit is held hovering at a distance to the workpiece or strip surface.

Device for inspecting workpiece surfaces and strip materials

A device for gripping a substrate without contact with which the substrate can be more securely transported. In the device, a housing cap has an air inlet in the upper surface and a lower opening, the lower opening communicating with the air inlet such that air introduced through the air inlet exits through the lower opening. A contour of the lower opening in its vertical cross section is convexly rounded such that the introduced air is guided along a horizontal undersurface of the housing cap. A nozzle is disposed in an inner hollow space of the housing cap, and has an inclined surface such that the width of the nozzle gradually decreases in the direction from the undersurface of the nozzle to the upper surface of the nozzle adjacent to the air inlet. The undersurface of the nozzle is at a predetermined distance from the inner surface of the housing cap. An ultrasonic shaker applies ultrasonic vibration to the housing cap.

Device for gripping substrate without contact

A vacuum gripper for gripping a work-piece includes a flat or curved gripper plate having at least one suction port. A work-piece suction throttling zone is formed around the suction port. The gripper plate has at least one recess provided at a side facing the work-piece and arranged beyond the work-piece suction throttling zone () formed around the suction port. At least one vent hole is formed within each of the recesses.

Vacuum gripper

The invention relates to a device for inspecting contact-sensitive planar materials or workpieces, e.g. wafers for the semiconductor industry, solar cells, glasses, FPD substrates, or biologically active substrates for biosensors, as well as materials having contact-sensitive curved surfaces. Said inspection device comprises a support element () for supporting a material () on the top face of the support element (), at least one oscillator which is connected to the support element () and the oscillation frequency and amplitude of which are selected in such a way as to keep the material () hovering on the support element (), and at least one optical sensor (). The support element is made of a light-permeable material, and the optical sensor () is arranged below the support element ().

Inspection device

The present invention relates to a device for transporting and holding of touch-sensitive structural elements or materials, the device comprising the following features: At least an oscillatory plate-like take-upfor receiving the object to be transported or held, on which at least an oscillation generatoris fixed, and at least two supporting members, wherein the oscillation generatoris arranged on the plate-like take-upat a predetermined position thereof to set the plate-like take-up into flexural vibrations, and the supporting membersare arranged at positions where the amplitude of the flexural vibration is lower than the maximum amplitude by at least 50%, and the oscillation generatoris operated with a frequency setting the plate-like take-upinto vibrations so that the structural elements or the material are (is) levitating in a contact-free way.

Device for non-contact transporting and holding of objects or material

In a device for conveying and positioning structural elements at a conveying track, a structural element is brought into pending state at the conveying track and the conveying track is tilted in conveying direction so that the structural element slides downwards to approach a target point. The position of the structural element is detected. The device further includes a control unit wherein the position of the structural element is detected within a predetermined range of the target point to be reached, and a time, at which the conveying track is tilted and re-tilted at a predetermined angular speed by a predetermined angle, is determined by using a calculation and control algorithm, so that the structural element is intercepted.

Device for conveying and positioning of structural elements in non-contact way

A handler for transporting planar substrates, in particular wafers, used in the semiconductor industry, between at least two stations. The handler includes a movable flat support arm for receiving a substrate and means for defining the location of the substrate in the area of a predetermined point on the support arm. A vibration generator for generating a longitudinal ultrasonic vibration is provided, that the vibration generator interacts with the support arm in such a way that a substantially stationary vibration with at least one antinode can be set on the flat support arm, which permits a levitation of a substrate placed thereon. A means for defining the location of the substrate provide a lateral positioning exclusively by an interaction with the edge area of a substrate.

Growing community of inventors

Wuppertal, Germany

Josef Zimmermann