Applied Materials, Inc.

Tegal Corporation

Other

The Boc Group, Inc.

Turin Networks

Josef Thomas Hoog

Hooman Bolandi

Douglas H Warenback

Sergey D Lopatin

Christopher F Lane

Karl M Brown

Robert Z Bachrach

Connie P Wang

Lu Yang

Alexander S Polyak

Stephen S Greer

James Omer L'Heureux

Victor Pebenito

Lawrence E Foltzer

Calvin R Augason

Georges J Gorin

Miaojun Wang

Alex Boozenny

Juergen Henrich

Dongli Zeng

Susanne Schlaefer

Van Odell

James W Mitzel

Apparatus and methods of forming a battery-active material are described. An apparatus includes a first processing section that raises the temperature of a precursor material to a reaction threshold temperature, a second processing section that converts the precursor material to a battery-active material, and a third processing section that cools the resulting battery-active material. Each of the processing sections may be a continuous flow tubular component. The first and third processing sections may be metal, and the second processing section may be a refractory material for high temperature service. The battery-active material is collected using a solids collector.

Particle synthesis apparatus and methods

Methods and apparatus for transferring one or more substrates from a first pressure environment to a second pressure environment is provided. In one embodiment, a load lock chamber is provided. The load lock chamber comprises a first circular housing, and a second circular housing disposed within and movable relative to the first circular housing, one of the first circular housing or the second circular housing comprising a plurality of discrete regions, wherein at least a portion of the plurality of discrete regions are in selective fluid communication with one of at least two vacuum pumps based on the angular position of the second circular housing relative to the first circular housing.

Load lock chamber designs for high-throughput processing system

A method and apparatus for forming lithium-ion batteries and battery cell components, and more specifically, to a system and method for fabricating such batteries and battery cell components using deposition processes that form three-dimensional porous structures are provided. One method comprises texturing a conductive substrate by calendering the conductive substrate between opposing wire mesh structures, forming a first layer of cathodically active material having a first porosity on the surface of the textured conductive substrate, and forming a second layer of cathodically active material having a second porosity on the first layer, wherein the second porosity is greater than the first porosity.

Methods to fabricate variations in porosity of lithium ion battery electrode films

An apparatus comprising a first plate having a plurality of v-shaped grooves to hold a set of optical fibers and a second plate having a v-shaped groove to hold a secondary optical fiber is disclosed. In one embodiment, the second plate being movable relative to the first plate, so that the secondary optical fiber can be selectively coupled to one of the optical fibers of the first set of optical fibers.

V groove optic switch

An apparatus for reducing the sway of a trailer includes a first portion that is attached to a towing vehicle at any of several locations including an end portion of a receiver hitch, a bumper, a frame or body member, or by the use of a modified type of a drawbar having an offset member. A second portion is attached to a trailer at any of several locations including to a ball coupler by the use of an adapter plate, a modified ball coupler bracket, or directly to a tongue of the trailer. Intermediate the first and second portion at least one damper is disposed, preferably a hydraulic damper of the type that is generally used to form an automobile steering damper. The damper preferably includes spherical type bearings at each end thereof to allow for limited articulation about a point. A geometric arrangement (i.e., an angle) for the damper is provided whereby a sufficient dampening force is experienced the moment the trailer begins to deviate from normal. Alternative embodiments are described that increase the number of the hydraulic dampers that are utilized or affect the resistance they provide.

Anti-sway control device for trailers

Mechanisms for supporting, rotating, cooling and energizing a cylindrical target structure in a magnetron through supports at each end of the target structure. Two specific configurations are described. Particular arrangements of magnets are provided within the target cylinder. Two adjacent rotating target cylinders may optionally be employed in order to increase the rate of depositing sputtered material on a substrate. The various features of this invention are particularly adapted for a large-scale cylindrical magnetron used for sputtering coatings on architectural glass panels, automobile windshields and the like, but are also advantageous for use in coating very small substrates.

Rotating cylindrical magnetron structure for large area coating

In apparatus for transporting semiconductor wafers, a spatula contains a single major recess for receiving a wafer. Adjacent one edge of the recess is a shoulder for locating the wafer in the sequence of operations for loading the spatula. As a result of the sequence, the center of the wafer is held at a predetermined, known location.

Spatula for wafer transport

An improved plasma reaction chamber is described in which the interior electrode is readily removed. The interior electrode may comprise a variety of materials, including metallized plastic, thus enabling a disposable electrode and a greater variety of plasmas to be used.

Plasma reactor removable insert

A plasma reactor apparatus providing improved uniformity of etching and having a totally active reaction volume. The reactor apparatus is comprised of two electrically separated electrodes which bound a reaction volume. The topmost electrode functions as both a gas distribution manifold for uniformly injecting reactant gases into the reaction volume and as an exhaust manifold for uniformly withdrawing reaction products from the reaction volume. The two electrodes are so configured that the plasma reaction takes place only between the electrodes; there is no inactive space surrounding the electrodes to fill with plasma. The configuration is thus conservative of both reactants and energy. The bottommost plate which serves as a workpiece holder is movable with respect to the upper plate to permit loading and unloading of workpieces. The uppermost plate is the active RF electrode while the workpiece holder is maintained at a RF ground potential. The uppermost plate has a larger electrode area which effectively imposes a dc offset to the RF field which enhances the uniformity of the etching and decreases the undesirable spread of undercut etching.

Plasma reactor apparatus

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Novato, CA, United States of America

Josef Thomas Hoog