Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh

Josef Thalmeier

Franz Koppl

Rudolf Griesshammer

Helmut Hamster

Alois Goppinger

A process for making hollow silicon bodies by decomposition from a gaseous ompound containing silicon and depositing said silicon on heated carrier bodies, which comprises assembling in a decomposition device a number of board-shaped members of silicon to form a hollow carrier body, heating said body to the decomposition temperature of the gaseous compound, introducing the gas into the device whereby it is thermally decomposed, causing the silicon released thereby to become inseparately united with the hollow carrier body, the hollow silicon body so formed being immediately available for use in the semiconductor industries. The invention also comprises the silicon bodies so made.

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Braunau, undefined

Josef Thalmeier