Other

International Business Machines Corporation

Brooks Automation Gmbh

Acr Automation in Cleanroom Gmbh

Josef Gentischer

Wolfgang Schmutz

Rolf Martin Lehner

Gudrun Bohmer

Dieter Modjesch

Ekkehard Ueberreiter

Roland Mann

Herbert Walter

Erich Korber

The invention relates to a device for loading substrates into and unloading them from a clean room, comprising a lock device onto which a transport box for receiving the substrates can be placed and which is fitted with a hermetically sealing lock opening, and a process unit adjacent to the lock opening. To allow for a valid adjustment of the lock device in relation to the process unit even when the lock device is exchanged, the invention provides for an adapter device to be positioned between the process unit and the lock device to which the lock device can be removably fixed and which is maintained at the level of the process unit and can be adjustably aligned in relation to same.

Device for loading substrates into and unloading them from a clean room

An apparatus for applying a thin film of a liquid coating medium onto a curved surface of an article includes a receptacle for the article, a rotatably drivable turntable on which the receptacle is held and a nonrotatable process pot surrounding the receptacle and the turntable. A spray ring surrounds the surface to be coated and is retained at the open end of the process pot. It defines a central inflow opening. Several annular gaps are defined and the receptacle is provided with a suction cone. A laminar flow is aimed at the spray ring at the top of the process pot and the bottom of the process pot is joined to a suction flow.

Device for applying a thin coat on the surface of a screen of a cathode-ray tube

System for transferring substrates into clean rooms

Spinning plate for substrates

Arrangement for storing and transporting substrates under clean room conditions and for loading the substrates into a clean room. The substrates are individually accommodated in cassettes which are positively stackable. By means of a lifting means, the cassettes are positioned external to a loading slot of the clean room. A lateral sealing flap in the cassette is opened and the substrate is moved into the loading slot in a substrate drawer.

Arrangement for storing, transporting and loading substrates

The invention relates to an apparatus for testing electronic components, in particular IC's, having a transporting device to which holders for the components are detachably attached by fastening devices, and which is passed through a loading station to receive the components, a testing station to test the components and an unloading station to remove the components. To generally improve the functional efficiency of the apparatus and to carry out in particular the loading and unloading procedure with less danger of damaging the components, it is proposed according to the invention to provide that the holder, together with the components, can be attached to the transporting device in the loading station and be removed therefrom in the unloading station.

Apparatus for testing electronic components having a loading station a

The present invention relates to a method and an apparatus for the manufacture of dental prostheses by means of an electroerosion process by using two template electrodes for erosive excavation. The dental prosthesis to be inserted is made directly from solid material which has not been previously worked. The negative templates of the dental prosthesis contained in the template electrodes can also be made by the electroerosion method. The manufacture of the dental prosthesis can be accomplished by a simultaneous movement of the two template electrodes or by manufacture of the two form halves of the dental prosthesis at different times.

Method and apparatus for the manufacture of dental protheses

Growing community of inventors

Remshalden, Germany

Josef Gentischer