Tau-metrix, Inc.

Jose J Estabil

Majid Aghababazadeh

Nader Pakdaman

Gary L Steinbrueck

James S Vickers

The fabrication of the wafer may be analyzed starting from when the wafer is in a partially fabricated state. The value of a specified performance parameter may be determined at a plurality of locations on an active area of a die of the wafer. The specified performance parameter is known to be indicative of a particular fabrication process in the fabrication. Evaluation information may then be obtained based on a variance of the value of the performance parameter at the plurality of locations. This may be done without affecting a usability of a chip that is created from the die. The evaluation information may be used to evaluate how one or more processes that include the particular fabrication process that was indicated by the performance parameter value was performed.

Contactless technique for evaluating a fabrication of a wafer

The fabrication of the wafer may be analyzed starting from when the wafer is in a partially fabricated state. The value of a specified performance parameter may be determined at a plurality of test structures located on an active area of a die of the wafer. The specified performance parameter is known to be indicative of a particular fabrication process in the fabrication. Evaluation information may then be obtained based on a variance of the value of the performance parameter at the plurality of locations. This may be done without affecting a usability of a chip that is created from the die. The evaluation information may be used to evaluate how one or more processes that include the particular fabrication process that was indicated by the performance parameter value was performed.

Test structures for evaluating a fabrication of a die or a wafer

System and apparatus for using test structures inside of a chip during the fabrication of the chip

A system is provided for using test structures to evaluate a fabrication of a wafer. The test structures include a combination of device and interconnect elements that are provided on an active region of a die, on the wafer prior to the fabrication of the wafer being completed. The combination of device and interconnect elements include one or more circuits that are activatable to produce an output corresponding to measurable electrical and/or optical characteristics. A power receiving element that is configured to receive activation energy sufficient to cause the output on a contactless medium, so that the activation energy is received without affecting a usability of the die or wafer. The one or more circuits are structured to generate a variation in either the output or in a parameter determined from output, as a result of a process variation in a specific fabrication step that provided elements for forming the one or more circuits. A detector is provided to detect the output over the contactless medium, so as to receive the output without affecting a usability of the wafer when fabrication is completed.

System for using test structures to evaluate a fabrication of a wafer

Intra-chip power and test signal generation for use with test structures on wafers

The fabrication of the wafer may be analyzed starting from when the wafer is in a partially fabricated state. The value of a specified performance parameter may be determined at a plurality of locations on an active area of a die of the wafer. The specified performance parameter is known to be indicative of a particular fabrication process in the fabrication. Evaluation information may then be obtained based on a variance of the value of the performance parameter of the plurality of locations. This may be done without affecting a usability of a chip that is created from the die. The evaluation information may be used to evaluate how one or more processes that include the particular fabrication process that was indicated by the performance parameter value was performed.

Growing community of inventors

Weston, CT, United States of America

Jose J Estabil