Applied Materials, Inc.

Jose Albor

Shuo Na

Ilias Iliopoulos

Systems and methods are provided for determining a clean endpoint time for a current run of a chamber. The clean endpoint time for the current run may be determined by determining that a chamber parameter, such as a chamber pressure, has stabilized. Historical clean endpoint time data is updated by adding the clean endpoint time for the current run of the chamber. A recommended clean endpoint time is then determined for the chamber based on the updated historical clean endpoint time data.

Growing community of inventors

San Jose, CA, United States of America

Jose Albor