Pfeiffer Vacuum Gmbh

Jörg Stanzel

Armin Conrad

Armin Blecker

Helmut Bernhardt

Wolfgang Eberl

Robert Watz

Christopher Mark Rippl

Michael Willig

Aleksandr Shirinov

Jürgen Jung

Anneliese Reichhart

A gas friction pump, comprising stationary pump-active components () and rotatable pump-active components () secured on a rotatable rotor shaft (), wherein the rotor shaft is supported with a bearing () at the high-vacuum-side end and a bearing arrangement at a fore-vacuum side end, characterized in that the high-vacuum side bearing is formed as a conventional bearing, and the fore-vacuum bearing arrangement contains at least one gas bearing. In an advantageous embodiment, the gas bearing is formed as a module and can be brought in engagement with a cylindrical portion of the housing and secured therein.

Gas friction pump

A gas friction pump includes stationary () and rotatable () pump-active elements secured on a rotor shaft () and forming with the rotor shaft components of the rotor, with the rotor shaft () being supported by two, spaced from each other, radial bearings (), of which one is located closer to the gravity center of the rotor than the other, and an axial bearing (), and with the radial bearing (), which is located closer to the gravity center of the rotor, being formed as a gas bearing, and another radial bearing () being formed as a non-gas bearing.

A turbomolecular pump including a housing having a suction opening and a gas outlet opening, and a plurality of alternatingly arranged one behind another, stator and stator rings provided, respectively with support rings for supporting each a blade, with a support ring of a stator disc located adjacent to a high pressure region of the turbomolecular pump being connected with an adjacent housing part over a large surface or being formed with the adjacent housing part as one-piece part.

Turbomolecular pump

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Wetzlar, Germany

Jörg Stanzel