Leland Stanford Junior University

Jooyeun Ham

Zhenan Bao

Mark R Cutkosky

Aspects of various embodiments are directed to sensor apparatuses and methods thereof. An example sensor apparatus includes a capacitor and sensor circuitry. The capacitor includes a first substrate having a first electrode, a second substrate having a second electrode, and a dielectric layer. The dielectric layer has a plurality of dielectric structures arranged in a pattern, the first and second electrode being separated by the dielectric layer and arranged with an overlapping area with respect to one another. The sensor circuitry is coupled to the capacitor and configured and arranged to detect normal and shear forces applied to the sensor apparatus based on changes in capacitance derived from changes in at least one of a distance between first and second electrodes and the overlapping area of the first and second electrodes.

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Palo Alto, CA, United States of America

Jooyeun Ham