Samsung Display Co., Ltd.

Ubmaterials Inc.

Joonhwa Bae

Yoonho Khang

Myounghwa Kim

Myounggeun Cha

Jongchan Lee

Woojin Cho

Woonghee Jeong

Byoungkwon Choo

Hyunjin Cho

Youngki Shin

Jinhyung Park

A polishing slurry includes an abrasive material, a first oxide polishing promoter, a first nitride polishing inhibitor, and a second nitride polishing inhibitor. The first oxide polishing promoter includes a polymer-based oxide polishing promoter. The first nitride polishing inhibitor includes an anionic nitride polishing inhibitor. The second nitride polishing inhibitor includes at least one selected from a cationic nitride polishing inhibitor and a non-ionic nitride polishing inhibitor.

Polishing slurry and method of polishing substrate by using the polishing slurry

A thin film transistor includes a polysilicon layer on a substrate, which includes a first area between second and third areas. A polysilicon layer is formed on the substrate, and a source electrode and a drain electrode are formed on the polysilicon layer in the first and third areas. Each of the source electrode and the drain electrode includes a metal silicide layer adjacent the polysilicon layer.

Method of manufacturing thin film transistor, and method of manufacturing display apparatus

A method of manufacturing a thin film transistor substrate includes forming an amorphous silicon layer on a substrate, the substrate having a rectangular shape, and irradiating the amorphous silicon layer with a laser beam at a random pitch, such that the amorphous silicon layer is crystallizes into a polycrystalline silicon layer, wherein the laser beam has a major axis and a minor axis, the major axis being non-parallel with respect to sides of the substrate.

Method of manufacturing thin film transistor substrate, method of manufacturing display apparatus, thin film transistor substrate, and display apparatus

Thin film transistor substrate includes: a substrate; a crystalline silicon layer on the substrate; and a capping layer covering the crystalline silicon layer and including a first portion having a first thickness and a second portion having a second thickness that is greater than the first thickness.

Thin film transistor substrate, display apparatus including the same, method of manufacturing thin film transistor substrate, and method of manufacturing display apparatus

Thin film transistor, display apparatus comprising the same, method of manufacturing thin film transistor, and method of manufacturing display apparatus

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Yongin, South Korea

Joonhwa Bae