Samsung Electronics Co., Ltd.

Joonghan Shin

Hanmei Choi

Bongjin Kuh

Ki-chul Kim

Jonghyun Lee

Kichul Kim

Taegon Kim

JungWoo Seo

Jeongmin Lee

Nam Hoon Lee

Gi-Nam Park

Byung Joo Oh

Jongsung Lim

JeongMeung Kim

A transparent plate and a substrate processing system including the same are disclosed. The substrate processing system may include a chamber, a lamp provided below the chamber, and a plate provided in the chamber to load a substrate. The plate may include a center region having a first transmittance value and an edge region having with a second transmittance value higher than the first transmittance value.

Transparent plate and substrate processing system therewith

A semiconductor device includes a substrate, a first insulation layer formed on the substrate in a first region, a photon absorption seed layer formed on the first insulation layer in the first region and on the substrate in a second region separate from the first region, and a photon absorption layer formed on the photon absorption seed layer in the first region. The photon absorption seed layer has a particular structure that may assist in reducing dislocation density in a region that includes a photon absorption layer.

Semiconductor device and method for fabricating the same

Provided are a semiconductor device and a method of fabricating the same. The semiconductor device may include a plurality of unit cells provided on a semiconductor substrate. Each of the unit cells may include a buried insulating pattern buried in the semiconductor substrate, a first active pattern provided on the buried insulating pattern, and a second active pattern provided on the buried insulating pattern and spaced apart from the first active pattern. The buried insulating pattern may define a unit cell region, in which each of the unit cells may be disposed.

Semiconductor device and method of fabricating the same

Growing community of inventors

Yongin-si, South Korea

Joonghan Shin