Samsung Display Co., Ltd.

Joon Hyung Kim

Seung Jun Lee

Chung Hyuk Lee

Sung Jae Jung

Soo Young Jung

Jeong Mok Kim

Woo Hyun Kim

Young Su Chae

Young Woo Lee

A manufacturing apparatus and a manufacturing method are provided. A manufacturing apparatus includes a chamber, and a stage disposed in the chamber. The stage includes an upper surface on which a target substrate is disposed, a lower surface opposite to the upper surface, a first side surface extending between the upper surface and the lower surface in a first direction, and a second side surface extending between the upper surface and the lower surface in a second direction perpendicular to the first direction. The first side surface is in a round shape, and at least a portion of the first side surface is convex toward an outside of the stage.

Manufacturing apparatus and manufacturing method using the same

A laser ablation apparatus includes: a laser beam generator including beam sources for generating laser beams, the laser beam generator using a solid-state laser; an output beam generator for generating an output beam using the laser beams; and a substrate stage including at least one stage on which a carrier substrate formed on the front of a panel substrate is disposed. The output beam generator may include: mixers for generating mixed laser beams having two linear-polarizations orthogonal to each other by mixing the laser beams; and a photo molding machine for generating the output beam using the mixed laser beams.

Laser ablation apparatus and method of manufacturing display device

Provided are a substrate separation apparatus and method. The substrate separation apparatus includes: an upper transfer part which fixes the upper substrate and transfers the upper substrate in a positive X-axis direction in an XY coordinate system composed of an X axis and a Y axis intersecting each other; and a lower transfer part which is installed under the upper transfer part with a gap therebetween and fixes and transfers the lower substrate, wherein the lower transfer part includes: a lower holding unit on which the lower substrate is placed; and a lower guide unit which includes path guides for guiding movement of the lower holding unit, wherein the path guides include a first path guide which is parallel to the X axis and a second path guide which is continuous with the first path guide and contacts a straight line having a negative slope in the XY coordinate system.

Substrate separation apparatus and method

An apparatus for separating a first substrate and a second substrate which are in contact with each other, includes an upper transfer part which fixes the first substrate and transfers the first substrate in a positive X-axis direction in an XY coordinate system comprised of an X axis and an Y axis which perpendicularly intersect each other and a lower transfer part which is disposed under the upper transfer part with a gap therebetween and fixes and transfers the second substrate, wherein the lower transfer part comprises a first transfer section which transfers the second substrate in the positive X-axis direction, and a second transfer section which transfers the second substrate in the positive X-axis direction as well as a negative Y-axis direction.

Growing community of inventors

Hwaseong-si, South Korea

Joon Hyung Kim