Samsung Electronics Co., Ltd.

Fugen Co., Ltd.

Joo Taek Kim

Eun Kyung Lee

Eun Jeong Jeong

Hyun Sik Moon

Sang Yoon Lee

Bang Lin Lee

Jung Han Shin

Kook Hee Han

Hee Jun Ahn

The present invention relates generally to a pendulum valve that is installed in a connection pipe connecting a vacuum pump between the chamber of a dry etching apparatus and the vacuum pump in the etching line of a semiconductor manufacturing process and adjusts the amount of gas, and more particularly to a pendulum valve that includes a fixed housing configured such that a shaft coupled to a valve gate for adjusting the amount of gas is closely fixed to a valve housing through an O-ring and a rotation shaft (an internal shaft) coupled to the inside of the fixed housing, so that only the rotation shaft separate from the value housing is rotated by using a lip seal as a rotation axis, thereby suppressing the discharge of unnecessary particles and hardened substances while maintaining the sealing characteristics of the pendulum valve.

Pendulum valve

Example embodiments of the present invention relate to an organic insulator composition, an organic insulating film having the organic insulator composition, an organic thin film transistor having the organic insulating film, an electronic device having the organic thin film transistor and methods of forming the same. Other example embodiments of the present invention relate to an organic insulator composition including a fluorinated silane compound that may be used to improve the charge carrier mobility and hysteresis of an organic thin film transistor. An organic insulator composition including a fluorinated silane compound and an organic thin film transistor using the same is provided. The hysteresis and physical properties, e.g., threshold voltage and/or charge carrier mobility, of the organic thin film transistor may be improved by the use of the organic insulator composition. The organic thin film transistor may be effectively used in the manufacture of a variety of electronic devices including liquid crystal displays (LCDs) and/or photovoltaic devices.

Organic insulator composition, organic insulating film having the same, organic thin film transistor having the same and electronic device having the same and methods of forming the same

Disclosed herein are NPN-type low molecular aromatic ring compounds, organic semiconductor layers formed from such compounds that exhibit improved electrical stability and methods of forming such layers using solution-based processes, for example, spin coating processes performed at or near room temperature. These NPN-type compounds may be used, either singly or in combination, for fabricating organic semiconductor layers in electronic devices. The NPN-type aromatic ring compounds according to example embodiments may be deposited as a solution on a range of substrates to form a coating film that is then subjected to a thermal treatment to form a semiconductor thin film across large substrate surfaces that exhibits reduced leakage currents relative to conventional PNP-type organic semiconductor materials, thus improving the electrical properties of the resulting devices.

NPN-type low molecular aromatic ring compounds and organic semiconductors and electronic devices incorporating such compounds

Growing community of inventors

Suwon-si, South Korea

Joo Taek Kim