Samsung Electronics Co., Ltd.

Joo-Ae Yoon

Hyang-Shik Kong

Sung-Man Kim

Jong-Woong Chang

Seong-Young Lee

Young-Goo Song

Dong-Hyun Ki

Jeong-Min Park

Hong-Sick Park

Jong-Hyun Choung

Bong-Kyun Kim

Byeong-Jin Lee

Sun-Young Hong

Doo-Hee Jung

Won-Suk Shin

A thin film array panel is provided, which includes: a plurality of signal lines including contact parts for contact with an external device; a plurality of thin film transistors connected to the signal lines; an insulating layer formed on the signal lines and the thin film transistors; and a plurality of pixel electrodes formed on the insulating layer and connected to the thin film transistors, wherein the insulating layer includes a contact portion disposed on the contact parts of the signal lines and having a thickness smaller than other portions and the contact portion of the insulating layer includes an inclined portion having an inclination angle smaller than about 45 degrees.

Thin film array panel and manufacturing method thereof

A method of manufacturing a thin film transistor array panel, including: forming gate lines on a substrate; forming a gate insulating layer on the gate lines; forming semiconductor layers on the gate insulating layer; forming data lines and drain electrodes on the semiconductor layers; depositing a passivation layer on the data lines and the drain electrodes; forming a first photoresist layer including a first portion and a second portion that is thinner than the first portion on the passivation layer; forming a first preliminary contact hole exposing the data lines by etching the passivation layer by using the first photoresist layer as a mask; removing the second portion of the first photoresist; forming a first contact hole by expanding the first preliminary contact hole and opening portions by etching the passivation layer by using the first portion of the first photoresist layer as a mask; depositing a conductor layer; and forming pixel electrodes in the opening portions and a first contact assistant member in the first contact hole by removing the first photoresist layer and the conductor layer located thereon.

Thin film transistor array panel and method of manufacture

Growing community of inventors

Seongnam-si, South Korea

Joo-Ae Yoon