Massachusetts Institute of Technology

Jonilyn L Yoder

William D Oliver

Danna Rosenberg

Rabindra N Das

Andrew J Kerman

Donna-Ruth Webb Yost

Mark A Gouker

Vladimir Bolkhovsky

David J Hover

Mollie Schwartz

Wayne Woods

Corey W Stull

Thomas Hazard

Justin Mallek

Xhovalin Miloshi

Cyrus Hirjibehedin

Qubit circuits having components formed deep in a substrate are described. The qubit circuits can be manufactured using existing integrated-circuit technologies. By forming components such as superconducting current loops, inductive, and/or capacitive components deep in the substrate, the footprint of the qubit circuit integrated within the substrate can be reduced. Additionally, coupling efficiency to and from the qubit can be improved and losses in the qubit circuit may be reduced.

Qubit circuits with deep, in-substrate components

A superconducting integrated circuit includes at least one superconducting resonator, including a substrate, a conductive layer disposed over a surface of the substrate with the conductive layer including at least one conductive material including a substantially low stress polycrystalline Titanium Nitride (TiN) material having an internal stress less than about two hundred fifty MPa (magnitude) such that the at least one superconducting resonator and/or qubit (hereafter called 'device') is provided as a substantially high quality factor, low loss superconducting device.

Superconducting integrated circuit

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Billerica, MA, United States of America

Jonilyn L Yoder