Average Co-Inventor Count = 4.61
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Asm IP Holding B.v. (3 from 1,132 patents)
3 patents:
1. 11866823 - Substrate supporting unit and a substrate processing device including the same
2. D981973 - Reactor wall for substrate processing apparatus
3. 11499226 - Substrate supporting unit and a substrate processing device including the same