Samsung Electronics Co., Ltd.

Jongin Yun

Changhyun Lee

Sunghoi Hur

Jinman Han

Doogon Kim

Junhyoung Kim

Moorym Choi

Youngbum Woo

Hyunjae Kim

Taemok Gwon

A semiconductor device includes a first substrate including an impurity region including impurities of a first conductivity type, circuit devices on the first substrate, a lower interconnection structure electrically connected to the circuit devices, a second substrate on the lower interconnection structure and including semiconductor of the first conductivity type, gate electrodes on the second substrate and stacked and spaced apart from each other in a first direction perpendicular to an upper surface of the second substrate, channel structures penetrating the gate electrodes, and a connection structure. The channel structures may extend perpendicular to the second substrate. The channel structures may include a channel layer. The connection structure may connect the impurity region of the first substrate to the second substrate, and the connection structure may include a via including a semiconductor of a second conductivity type.

Semiconductor devices and data storage systems including the same

Provided is a programming method of a nonvolatile memory device. The nonvolatile memory device includes a substrate and a plurality of memory cells which are stacked in the direction perpendicular to the substrate. The programming method applies a first voltage to a selected bit line connected to at least two memory strings in same column including a memory cell of the plurality of memory cell to be programmed, applies a second voltage to an unselected bit line connected to at least two memory strings in same column including a memory cell of the plurality of memory cell to be program-prohibited, applies a third voltage to a selected string selection line connected to at least two memory strings in same row, applies a fourth voltage to an unselected string selection line connected to at least two memory strings in same row, and applies a program operation voltage to a plurality of word lines, each word line connected to each corresponding memory cell in the memory string, wherein the first to third voltages are positive voltages.

Nonvolatile memory device, programming method thereof and memory system including the same

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Seoul, South Korea

Jongin Yun