Semes Co., Ltd.

Jonghyeon Woo

Gui Su Park

Young Hun Lee

Seung Hoon Oh

Jin Mo Jae

Youngseop Choi

Inhwang Park

Young Jin Jang

Byungsun Bang

Heehwan Kim

Buyoung Jung

Youngjun Choi

Jin Tack Yu

Daehun Kim

Jonghan Kim

Cheol-Yong Shin

An apparatus for treating a substrate includes a process chamber having a treatment space for treating the substrate; a fluid supply unit for supplying fluid to the treatment space, wherein the fluid supply unit includes: a supply pipe connected to the treatment space to supply the fluid to the treatment space; a pump installed in the supply pipe to provide flow pressure to the fluid; a vent line installed between the pump and the process chamber to discharge pressure in the fluid to an outside; a relief valve installed in the vent line to open and close the vent line; and a reservoir installed between the pump and a branch point wherein the vent line branches from the supply pipe, wherein the reservoir has a cross-sectional area larger than a cross-sectional area of a portion of the supply pipe located between the pump and the branch point.

Fluid supply unit and substrate treating apparatus having the same

An apparatus for supporting a substrate includes a rotatable spin head that supports the substrate, a hollow shaft that is connected with the spin head and that transmits torque to the spin head, a nozzle assembly that is disposed in an interior space of the spin head so as not to rotate and that supplies a treatment liquid to a backside of the substrate, and a sealing member that seals a gap between the spin head and the nozzle assembly using a magnetic fluid.

Substrate support unit and substrate treating apparatus having the same

Disclosed are a standby port and a substrate processing apparatus having the same. The standby port exhausts fumes generated when a processing liquid is discharged into the standby port before the supply of the processing liquid onto a substrate, thereby preventing pollution of a chamber atmosphere.

Standby port and substrate processing apparatus having the same

Growing community of inventors

Asan-si, South Korea

Jonghyeon Woo