Samsung Electronics Co., Ltd.

Jongho Woo

Yong-Hoon Son

Jihoon Park

Joongshik Shin

Euntaek Jung

Minjun Lee

Youngji Noh

Junho Cha

A three-dimensional semiconductor device includes a plate common source line, first and second word lines spaced apart from each other to at least partially define a vertical space therebetween, a channel pattern in the vertical space, a ferroelectric layer including a first portion between the channel pattern and the first word line, a second portion between the channel pattern and the second word line, and a third portion contacting the plate common source line, a bit line in the vertical space to contact the channel pattern and having a first width in a first horizontal direction, and a source line spaced apart from the bit line in the vertical space to contact the channel pattern, having a second width greater than the first width in the first horizontal direction, and having a source line contact portion inside the plate common source line.

Three-dimensional semiconductor device including ferroelectric transistor

A three-dimensional semiconductor device includes a substrate including a cell array region and a contact region, a stack structure including gate electrodes sequentially stacked on the substrate, vertical structures penetrating the stack structure, and cell contact plugs connected to end portions of the gate electrodes in the contact region. Upper surfaces of the end portions of the gate electrodes have an acute angle with respect to an upper surface of the substrate in the cell array region.

Three-dimensional semiconductor devices with inclined gate electrodes

Growing community of inventors

Hwaseong-si, South Korea

Jongho Woo