Semicat, Inc.

Jonggu Park

Jae Yeol Park

Michael Nam

Jin Hyun Kim

Embodiments of the invention relate generally to semiconductor device fabrication and processes, and more particularly, to an apparatus and a system for implementing arrangements of magnetic field generators configured to facilitate physical vapor deposition ('PVD') and/or controlling impedance matching associated with a non-metal-based plasma used to modify a non-metal film, such as a chalcogenide-based film.

System and apparatus to facilitate physical vapor deposition to modify non-metal films on semiconductor substrates

Embodiments of the invention relate generally to semiconductor device fabrication and processes, and more particularly, to methods for implementing arrangements of magnetic field generators configured to facilitate physical vapor deposition ('PVD') and/or for controlling impedance matching associated with a non-metal-based plasma used to modify a non-metal film, such as a chalcogenide-based film.

Growing community of inventors

Gwangju-si, South Korea

Jonggu Park