Korea Advanced Institute of Science and Technology

Jong Yeop Shim

Ki Hyun Kim

Dong Min Kim

Dae Gab Gweon

A 3-axis straight-line motion stage and a sample test device using the same for supporting a predetermined sample, and comprising X-axis, Y-axis and Z-axis stages for moving the sample independently and precisely in the direction of the X-axis, the Y-axis or the Z-axis of rectangular coordinates. The 3-axis straight-line motion stage comprises a bottom platehaving a predetermined area and thickness; a X-axis stagefixed in a reference area RR of the bottom platefor moving in the direction of the X-axis a first X area RXpositioned from the reference RR to the direction of the X-axis; a Y-axis stagepositioned within the first X area RXand fixed in a second X area RXwhich is located within the first X area RXfor moving in the direction of the Y-axis a second Y area RYpositioned from the second X area to the direction of the Y-axis; and a Z-axis stagefixed in the second Y area RYwhich is located within the first Y area RYand supporting a predetermined sample for moving the sample in the direction of the Z-axis.

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Daejeon, South Korea

Jong Yeop Shim