Industrial Technology Research Institute

Jong-Yen Lin

Gwo-Jou Huang

Chieh-Ling Hsiao

An apparatus for holding substrate includes a base housing. A plurality of pins are set on the top surface of the base housing. Further, the top surface has a plurality of openings through the top surface. The base housing has a first opening set on the bottom portion of one side of the base housing. Lift means is set in the base housing. A support member having an oblique surface structure is provided in the cylindrical housing and can upwardly pass through an opening formed on top of the cylindrical housing. A plate having a plurality of pins formed thereon is connected to the top of the support member. A substrate holder can be separated from the base housing, and the substrate holder includes a plate. A glass substrate is fixed on the plate by means of a plurality of fixers.

Apparatus for holding substrates

The present invention comprises a circuit for generating a large-amplitude oscillating voltage. The circuit includes a power supply means for providing an input voltage and a power supply switching means including a solid state relay (SSR) connected to the power supply means for switching on and off the power supply means. The circuit further includes an voltage oscillating means connected to the power supply switching means to be activated by the input voltage and a voltage regulating means connected in series between the power supply switching means and the voltage oscillating means for regulating the input voltage. The circuit further includes a gate driver means connected in parallel between the power supply means and the voltage oscillating means for generating a driving voltage to the voltage oscillating means for generating the large-amplitude oscillating voltage when the solid state relay is switched on.

Growing community of inventors

Hsinchu, Taiwan

Jong-Yen Lin