Psk Inc.

Woosung Pharmaceutical Co., Ltd.

Jong Woo Park

Sung Jin Yoon

Young Jae Ma

Jeong Rae Cho

Hyo Jeong Seo

Embodiments of the inventive concept provide a substrate processing apparatus. The substrate treating apparatus comprises a process treating unit providing a treating space performed treating the substrate; a plasma generating unit generating the plasma discharging a process gas, and supplying the plasma to the treating space. The plasma generating unit provides a plasma chamber having a generating space of the plasma; an antenna wound to surround the plasma chamber outside the plasma chamber; a first coating film covering inside walls of the plasma chamber and comprising yttrium fluoride (YF3).

Substrate processing apparatus

The present disclosure relates to the injection composition containing acetaminophen, the injection composition comprising acetaminophen mixed in 0.01&#x2dc;5 wt %, a solubilizer mixed in 0.01&#x2dc;10 wt %, a toxicity inhibitor mixed in 0.05&#x2dc;5 wt %, an isotonic agent mixed in 0.1&#x2dc;10 wt %, an antioxidant mixed in 0.001&#x2dc;5 wt %, and the balance sterile purified water for injection.

Growing community of inventors

Gyeonggi-do, South Korea

Jong Woo Park