Samsung Display Co., Ltd.

Samsung Electronics Co., Ltd.

Samsung Mobile Display Co., Ltd.

Jong-Won Hong

Seok-Rak Chang

Heung-Yeol Na

Min-Jae Jeong

Ki-Yong Lee

Eu-Gene Kang

Gil-heyun Choi

Dong-Hyun Lee

Yun-Mo Chung

Kil-Won Lee

Jong-myeong Lee

Jin-Wook Seo

Byoung-Keon Park

Tae-Hoon Yang

Jong-Ryuk Park

Bo-Kyung Choi

In-Sun Park

Kyung-In Choi

Jae-Wan Jung

Hyun-Bae Lee

Hei-seung Kim

Sang-Woo Lee

Byung-Soo So

Ivan Maidanchuk

Jong-Myeong Lee

Young-Dae Kim

Young-Mook Choi

Ji-Su Ahn

Myeng-Woo Nam

Won-Bong Baek

Sang-Hoon Ahn

Woo-Jin Lee

Jae-Kwang Ryu

Jong-Heon Kim

Chang-Mog Jo

Maxim Lisachenko

Uno Chang

Joon-Hoo Choi

Sang-Su Kim

Dae-Woo Lee

Ji-soon Park

Hee-Cheol Kang

Kyoung-Hee Nam

Sang-Yon Yoon

Seung-Kyu Park

Jong-Min Baek

Sang-Hyun Yun

Yong-Duck Son

Seong-hwee Cheong

Geum-jung Seong

Hyun-Woo Koo

Seung-Gil Yang

Eugene Kang

Eun-Sun Choi

Yun-Ho Chang

Jung-soo Yoon

Si-Young Park

Seoung-Jae Oh

Yong Sup Choi

Seok-RaK Chang

A semiconductor device includes a substrate, a conductive pattern, a side spacer, and an air gap. The substrate includes an interlayer insulating layer and a trench penetrating the interlayer insulating layer. The conductive pattern is disposed within the trench of the substrate. The side spacer is disposed within the trench. The side spacer covers an upper side surface of the conductive pattern. The air gap is disposed within the trench. The air gap is bounded by a sidewall of the trench, the side spacer, and a lower side surface of the conductive pattern. A level of a bottom surface of the conductive pattern is lower than a level of bottom surfaces of the side spacer.

Semiconductor device and method of fabricating the same

An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck that fixedly supports a substrate that is a deposition target; a deposition unit including a chamber maintained at a vacuum and an organic layer deposition assembly for depositing an organic layer on the substrate fixedly supported by the electrostatic chuck; and a first conveyor unit for moving the electrostatic chuck fixedly supporting the substrate into the deposition unit, wherein the first conveyor unit passes through inside the chamber, and the first conveyor unit includes a guide unit having a receiving member for supporting the electrostatic chuck to be movable in a direction.

Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same

A semiconductor device includes a metal pattern filling a trench formed through at least a portion of an insulating interlayer on a substrate and including copper, and a wetting improvement layer pattern in the metal pattern including at least one of tantalum, tantalum nitride, titanium, titanium nitride, ruthenium, cobalt and manganese.

Semiconductor devices and methods of manufacturing the same

A deposition apparatus includes: a transfer unit including a first transfer unit and a second transfer unit, wherein the first transfer unit transfers, in a first direction, a moving unit to which a substrate is detachably fixed, and the second transfer unit transfers, in an opposite direction of the first direction, the moving unit from which the substrate is separated, and a deposition unit including a deposition assembly wherein the deposition assembly deposits a material on the substrate spaced apart from the deposition assembly while the first transfer unit transfers the substrate which is fixed to the moving unit, wherein the first transfer unit includes a first support unit that supports both ends of the moving unit in the first direction, and a second support unit that supports a side of the moving unit opposite to a side close to the deposition assembly.

Deposition apparatus, method of manufacturing organic light-emitting display apparatus by using same, and organic light-emitting display apparatus manufactured by using deposition apparatus

An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck that fixedly supports a substrate that is a deposition target; a deposition unit including a chamber maintained at a vacuum and an organic layer deposition assembly for depositing an organic layer on the substrate fixedly supported by the electrostatic chuck; and a first conveyer unit for moving the electrostatic chuck fixedly supporting the substrate into the deposition unit, wherein the first conveyer unit passes through inside the chamber, and the first conveyer unit includes a guide unit having a receiving member for supporting the electrostatic chuck to be movable in a direction.

A thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in the first direction; a position detection member that detects a relative position of the substrate to the patterning slit sheet; and an alignment control member that controls a relative position of the patterning slit sheet to the substrate by using the relative position of the substrate detected by the position detection member, wherein the thin film deposition apparatus and the substrate are separated from each other, and the thin film deposition apparatus and the substrate are moved relative to each other.

Thin film deposition apparatus

A method of manufacturing an organic light-emitting display device is provided. An alignment master member is loaded on a moving unit. An organic layer deposition assembly is pre-aligned to the alignment master member. After the pre-aligning of the organic layer deposition assembly, a substrate is loaded on the moving unit. The organic layer deposition assembly is aligned to the substrate positioned as is after the loading of the substrate. An organic layer is formed on the substrate while the moving unit is moving along the moving direction. While the moving unit is moving along the moving direction, the organic layer deposition assembly is adjusted so that an interval between the organic layer deposition assembly and part of the substrate is maintained as substantially constant. The part of the substrate receives a deposition material emitted from the organic layer deposition assembly to form the organic layer.

Method of manufacturing organic light emitting display device using organic layer deposition apparatus

Provided is a sputtering apparatus which deposits a metal catalyst on an amorphous silicon layer at an extremely low concentration in order to crystallize amorphous silicon, and particularly minimizes non-uniformity of the metal catalyst caused by a pre-sputtering process without reducing process efficiency. This sputtering apparatus improves the uniformity of the metal catalyst deposited on the amorphous silicon layer at an extremely low concentration. The sputtering apparatus includes a process chamber having first and second regions, a metal target located inside the process chamber, a target transfer unit moving the metal target and having a first shield for controlling a traveling direction of a metal catalyst discharged from the metal target, and a substrate holder disposed in the second region to be capable of facing the metal target. A distance difference between a linear distance, which is a distance between a substrate loaded on the substrate holder and the metal target, and a length of the first shield is less than 3 cm.

Sputtering apparatus

An organic layer deposition apparatus includes: a conveyer unit including a transfer unit, a first conveyer unit, and a second conveyer unit; a loading unit for fixing a substrate to the transfer unit; a deposition unit including a chamber and at least one organic layer deposition assembly; and a measuring unit located between the loading unit and the deposition unit to measure position information of the substrate before an organic layer is deposited onto the substrate; and an unloading unit for separating, from the transfer unit, the substrate onto which the deposition has been completed, wherein the transfer unit is configured to cyclically move between the first conveyer unit and the second conveyer unit, and wherein the substrate fixed to the transfer unit is configured to be spaced apart from the at least one organic layer deposition assembly while being transferred by the first conveyer unit.

Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the organic layer deposition apparatus

A method of fabricating a semiconductor device includes forming switching devices on a substrate. A lower structure is formed in the substrate having the switching devices. A lower conductive layer is formed on the lower structure. Sacrificial mask patterns are formed on the lower conductive layer. Lower conductive patterns are formed by etching the lower conductive layer using the sacrificial mask patterns as an etch mask. An interlayer insulating layer is formed on the substrate having the lower conductive patterns. Interlayer insulating patterns are formed by planarizing the interlayer insulating layer until the sacrificial mask patterns are exposed. Openings exposing the lower conductive patterns are formed by removing the exposed sacrificial mask patterns. Upper conductive patterns self-aligned with the lower conductive patterns are formed in the openings.

Method of fabricating semiconductor device

A magnetron unit moving apparatus for preventing magnetization and magnetron sputtering equipment having the same. The magnetron unit moving apparatus includes a magnetron unit disposed adjacent to a target, to generate a specific magnetic field, and a movement unit to space the magnetron unit and the target apart such that a strength of a magnetic field generated over the target is within a predetermined reference strength range. It is possible to space the target and the magnetron unit apart so as to prevent the target from being magnetized when a process is not performed.

Magnetron unit moving apparatus for preventing magnetization and magnetron sputtering equipment having the same

A thin film deposition apparatus that can be easily used to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus. The thin film deposition apparatus includes: a loading unit to place a substrate, which is a deposition target, on an electrostatic chuck; a deposition unit including a chamber, and a thin film deposition assembly that is disposed in the chamber and forms a thin film on the substrate placed on the electrostatic chuck; an unloading unit to separate the substrate on which deposition is completed from the electrostatic chuck; a first conveyor unit to sequentially move the electrostatic chuck having the substrate thereon to the loading unit, to the deposition unit, and finally, to the unloading unit, wherein the first conveyor unit includes: one pair of first guide rails and one pair of second guide rails disposed in parallel; at least one first guide block engaged with the first guide rails, respectively; and at least one second guide block engaged with the second guide rails, respectively.

Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same

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Yongin, South Korea

Jong-Won Hong